Invention Grant
- Patent Title: Fluid sensor chip and method for manufacturing the same
- Patent Title (中): 流体传感器芯片及其制造方法
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Application No.: US14143634Application Date: 2013-12-30
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Publication No.: US09347911B2Publication Date: 2016-05-24
- Inventor: Guenther Ruhl , Florian Bachl
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Eschweiler & Associates, LLC
- Main IPC: G01N27/403
- IPC: G01N27/403
Abstract:
A fluid sensor chip includes an isolator substrate including amorphous carbon, an electrical conductor including graphite and an active material including graphene or carbon nanotubes.
Public/Granted literature
- US20150185180A1 FLUID SENSOR CHIP AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2015-07-02
Information query
