发明授权
- 专利标题： Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp
- 专利标题（中）： 静电夹具，光刻设备及制造静电夹具的方法
-
申请号： US13991089申请日： 2011-09-21
-
公开(公告)号： US09348236B2公开(公告)日： 2016-05-24
- 发明人: Peter Richard Helmus , Matthew Lipson , Ronald A. Wilklow , James Kennon , Kennard White , Wilbur Jordan Reichmann, II
- 申请人： Peter Richard Helmus , Matthew Lipson , Ronald A. Wilklow , James Kennon , Kennard White , Wilbur Jordan Reichmann, II
- 申请人地址： NL Veldhoven
- 专利权人： ASML HOLDING N.V.
- 当前专利权人： ASML HOLDING N.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Pillsbury Winthrop Shaw Pittman LLP
- 国际申请： PCT/EP2011/066387 WO 20110921
- 国际公布： WO2012/076207 WO 20120614
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; H01T23/00 ; G03F7/20 ; H02N13/00
摘要：
An electrostatic clamp for use in a lithographic apparatus includes burls and an electrode surrounded by an insulator and/or a dielectric material between adjacent burls. In an embodiment, two or more layers of dielectric material are provided between adjacent burls and surround an electrode provided between adjacent burls. The electrostatic clamp may be used to clamp an object to an object support in a lithographic apparatus.
公开/授权文献
信息查询
IPC分类:
