Invention Grant
- Patent Title: Charged-particle lens that transmits emissions from sample
- Patent Title (中): 透过样品发射的带电粒子透镜
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Application No.: US14334293Application Date: 2014-07-17
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Publication No.: US09349564B2Publication Date: 2016-05-24
- Inventor: N. William Parker , Marcus Straw , Jorge Filevich
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates
- Agent Michael O. Scheinberg
- Main IPC: H01J37/12
- IPC: H01J37/12 ; H01J37/26 ; H01J37/244
Abstract:
A transmissive lens in a charged particle beam column for detecting X-rays and light is provided. The final lens may include elements that are transmissive for X-rays for EDS imaging and analysis or elements that are transmissive for light for cathodoluminescent (CL) imaging and analysis. The final lens may be constructed and arranged to include elements that are transmissive for both X-rays and light for combined EDS and CL imaging and analysis.
Public/Granted literature
- US20160020062A1 Charged-Particle Lens that Transmits Emissions from Sample Public/Granted day:2016-01-21
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