Invention Grant
US09349730B2 Fin transformation process and isolation structures facilitating different Fin isolation schemes 有权
翅片转换过程和隔离结构促进不同的鳍隔离方案

Fin transformation process and isolation structures facilitating different Fin isolation schemes
Abstract:
Methods and semiconductor structures formed from the methods are provided which facilitate fabricating semiconductor fin structures. The methods include, for example: providing a wafer with at least one semiconductor fin extending above a substrate; transforming a portion of the semiconductor fin(s) into an isolation layer, the isolation layer separating a semiconductor layer of the semiconductor fin(s) from the substrate; and proceeding with forming a fin device(s) of a first architectural type in a first fin region of the semiconductor fin(s), and a fin device(s) of a second architectural type in a second fin region of the semiconductor fin(s), where the first architectural type and the second architectural type are different fin device architectures.
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