Invention Grant
- Patent Title: Fin transformation process and isolation structures facilitating different Fin isolation schemes
- Patent Title (中): 翅片转换过程和隔离结构促进不同的鳍隔离方案
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Application No.: US13945415Application Date: 2013-07-18
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Publication No.: US09349730B2Publication Date: 2016-05-24
- Inventor: Ajey Poovannummoottil Jacob , Kangguo Cheng , Bruce B. Doris , Nicolas Loubet , Prasanna Khare , Ramachandra Divakaruni
- Applicant: GLOBALFOUNDRIES Inc. , INTERNATIONAL BUSINESS MACHINES CORPORATION , STMICROELECTRONICS, INC.
- Applicant Address: KY Grand Cayman US TX Coppell
- Assignee: GLOBALFOUNDRIES INC.,STMICROELECTRONICS, INC.
- Current Assignee: GLOBALFOUNDRIES INC.,STMICROELECTRONICS, INC.
- Current Assignee Address: KY Grand Cayman US TX Coppell
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Kristian E. Ziegler
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L27/088 ; H01L21/84 ; H01L27/12 ; H01L21/02

Abstract:
Methods and semiconductor structures formed from the methods are provided which facilitate fabricating semiconductor fin structures. The methods include, for example: providing a wafer with at least one semiconductor fin extending above a substrate; transforming a portion of the semiconductor fin(s) into an isolation layer, the isolation layer separating a semiconductor layer of the semiconductor fin(s) from the substrate; and proceeding with forming a fin device(s) of a first architectural type in a first fin region of the semiconductor fin(s), and a fin device(s) of a second architectural type in a second fin region of the semiconductor fin(s), where the first architectural type and the second architectural type are different fin device architectures.
Public/Granted literature
- US20150021690A1 FIN TRANSFORMATION PROCESS AND ISOLATION STRUCTURES FACILITATING DIFFERENT FIN ISOLATION SCHEMES Public/Granted day:2015-01-22
Information query
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