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US09349840B2 Methods of forming stressed channel regions for a FinFET semiconductor device and the resulting device 有权
形成用于FinFET半导体器件的应力沟道区域的方法和所得到的器件

Methods of forming stressed channel regions for a FinFET semiconductor device and the resulting device
Abstract:
An illustrative method includes forming a FinFET device above structure comprising a semiconductor substrate, a first epi semiconductor material and a second epi semiconductor material that includes forming an initial fin structure that comprises portions of the semiconductor substrate, the first epi material and the second epi material, recessing a layer of insulating material such that a portion, but not all, of the second epi material portion of the initial fin structure is exposed so as to define a final fin structure, forming a gate structure above and around the final fin structure, removing the first epi material of the initial fin structure and thereby define an under-fin cavity under the final fin structure and substantially filling the under-fin cavity with a stressed material.
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