Invention Grant
US09349840B2 Methods of forming stressed channel regions for a FinFET semiconductor device and the resulting device
有权
形成用于FinFET半导体器件的应力沟道区域的方法和所得到的器件
- Patent Title: Methods of forming stressed channel regions for a FinFET semiconductor device and the resulting device
- Patent Title (中): 形成用于FinFET半导体器件的应力沟道区域的方法和所得到的器件
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Application No.: US14883049Application Date: 2015-10-14
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Publication No.: US09349840B2Publication Date: 2016-05-24
- Inventor: Xiuyu Cai , Ruilong Xie , Ajey P. Jacob , Witold P. Maszara , Kangguo Cheng , Ali Khakifirooz
- Applicant: GLOBALFOUNDRIES Inc. , International Business Machines Corporation
- Applicant Address: KY Grand Cayman US NY Armonk
- Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- Current Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- Current Assignee Address: KY Grand Cayman US NY Armonk
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/66 ; H01L29/78 ; H01L21/762 ; H01L21/02 ; H01L29/165

Abstract:
An illustrative method includes forming a FinFET device above structure comprising a semiconductor substrate, a first epi semiconductor material and a second epi semiconductor material that includes forming an initial fin structure that comprises portions of the semiconductor substrate, the first epi material and the second epi material, recessing a layer of insulating material such that a portion, but not all, of the second epi material portion of the initial fin structure is exposed so as to define a final fin structure, forming a gate structure above and around the final fin structure, removing the first epi material of the initial fin structure and thereby define an under-fin cavity under the final fin structure and substantially filling the under-fin cavity with a stressed material.
Public/Granted literature
- US20160035863A1 METHODS OF FORMING STRESSED CHANNEL REGIONS FOR A FINFET SEMICONDUCTOR DEVICE AND THE RESULTING DEVICE Public/Granted day:2016-02-04
Information query
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