发明授权
- 专利标题: Methods of forming an organic scattering layer, an organic light emitting diode with the scattering layer, and a method of fabricating the organic light emitting
- 专利标题(中): 形成有机散射层的方法,具有散射层的有机发光二极管以及制造有机发光的方法
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申请号: US14860659申请日: 2015-09-21
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公开(公告)号: US09349992B2公开(公告)日: 2016-05-24
- 发明人: Nam Sung Cho , Jeong Ik Lee , Joo Hyun Hwang , Chul Woong Joo , Jun-Han Han , Seung Koo Park , Jaehyun Moon , Doo-Hee Cho , Jin Wook Shin , Hye Yong Chu , Seongdeok Ahn , Jin Woo Huh , Myung Gi Lee , Kyung Soo Suh , Byoung Gon Yu
- 申请人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE , UNITEX Co., LTD
- 申请人地址: KR Daejeon KR Gyeonggi-Do
- 专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE,UNITEX CO., LTD
- 当前专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE,UNITEX CO., LTD
- 当前专利权人地址: KR Daejeon KR Gyeonggi-Do
- 代理机构: Rabin & Berdo, P.C.
- 优先权: KR10-2012-0134655 20121126
- 主分类号: H01L33/22
- IPC分类号: H01L33/22 ; H01L51/52 ; G02B5/02 ; C23C14/12 ; H01L51/56
摘要:
Provided is a method of fabricating an organic scattering layer. The method may include providing a deposition apparatus with a reaction chamber and a source chamber, loading a substrate in the reaction chamber, supplying carrier gas into the source chamber that may be configured to supply an evaporated organic source material into the reaction chamber, a temperature of the carrier gas ranging from 25° C. to 50° C., and spraying the carrier gas and the evaporated organic source material into the reaction chamber through a showerhead to deposit an organic scattering layer on the substrate, the organic scattering layer including organic particles, which may be provided in a molecularized form of the evaporated organic source material, and thereby having an uneven surface.
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