发明授权
US09349992B2 Methods of forming an organic scattering layer, an organic light emitting diode with the scattering layer, and a method of fabricating the organic light emitting 有权
形成有机散射层的方法,具有散射层的有机发光二极管以及制造有机发光的方法

Methods of forming an organic scattering layer, an organic light emitting diode with the scattering layer, and a method of fabricating the organic light emitting
摘要:
Provided is a method of fabricating an organic scattering layer. The method may include providing a deposition apparatus with a reaction chamber and a source chamber, loading a substrate in the reaction chamber, supplying carrier gas into the source chamber that may be configured to supply an evaporated organic source material into the reaction chamber, a temperature of the carrier gas ranging from 25° C. to 50° C., and spraying the carrier gas and the evaporated organic source material into the reaction chamber through a showerhead to deposit an organic scattering layer on the substrate, the organic scattering layer including organic particles, which may be provided in a molecularized form of the evaporated organic source material, and thereby having an uneven surface.
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