Invention Grant
- Patent Title: Methods of forming an organic scattering layer, an organic light emitting diode with the scattering layer, and a method of fabricating the organic light emitting
- Patent Title (中): 形成有机散射层的方法,具有散射层的有机发光二极管以及制造有机发光的方法
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Application No.: US14860659Application Date: 2015-09-21
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Publication No.: US09349992B2Publication Date: 2016-05-24
- Inventor: Nam Sung Cho , Jeong Ik Lee , Joo Hyun Hwang , Chul Woong Joo , Jun-Han Han , Seung Koo Park , Jaehyun Moon , Doo-Hee Cho , Jin Wook Shin , Hye Yong Chu , Seongdeok Ahn , Jin Woo Huh , Myung Gi Lee , Kyung Soo Suh , Byoung Gon Yu
- Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE , UNITEX Co., LTD
- Applicant Address: KR Daejeon KR Gyeonggi-Do
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE,UNITEX CO., LTD
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE,UNITEX CO., LTD
- Current Assignee Address: KR Daejeon KR Gyeonggi-Do
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2012-0134655 20121126
- Main IPC: H01L33/22
- IPC: H01L33/22 ; H01L51/52 ; G02B5/02 ; C23C14/12 ; H01L51/56

Abstract:
Provided is a method of fabricating an organic scattering layer. The method may include providing a deposition apparatus with a reaction chamber and a source chamber, loading a substrate in the reaction chamber, supplying carrier gas into the source chamber that may be configured to supply an evaporated organic source material into the reaction chamber, a temperature of the carrier gas ranging from 25° C. to 50° C., and spraying the carrier gas and the evaporated organic source material into the reaction chamber through a showerhead to deposit an organic scattering layer on the substrate, the organic scattering layer including organic particles, which may be provided in a molecularized form of the evaporated organic source material, and thereby having an uneven surface.
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