Invention Grant
- Patent Title: Flow guide device for dual-electrode discharge cavity, dual electrode discharge cavity utilize the same and excimer laser
- Patent Title (中): 双电极放电腔的导流装置,双电极放电腔使用相同的准分子激光器
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Application No.: US14646176Application Date: 2013-02-07
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Publication No.: US09350135B2Publication Date: 2016-05-24
- Inventor: Bin Liu , Jinbin Ding , Kuibo Wang , Yu Wang , Yi Zhou , Jiangshan Zhao
- Applicant: ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Beijing
- Agency: Hamre, Schumann, Muller & Larson, P.C.
- Priority: CN201210476797 20121121
- International Application: PCT/CN2013/071507 WO 20130207
- International Announcement: WO2014/079174 WO 20140530
- Main IPC: H01S3/22
- IPC: H01S3/22 ; H01S3/036 ; H01S3/225 ; H01S3/038 ; H01S3/097

Abstract:
The present disclosure proposes a flow guide device for a discharge cavity having a symmetrical configuration and including two pairs of electrodes; the flow guide device comprises two rotors which correspond to one pair of the two pairs of electrodes, respectively, installed positions of which are symmetrical about a symmetrical plane of the discharge cavity and is beneath the electrodes, a rotational axis of which is parallel to an axial direction of the electrodes which is parallel to a base plane of the discharge cavity, and the two rotors have opposite rotation directions and identical rotation speeds. The flow guide device further comprises a spoiler plate and a flow guide plate so that the discharge gas flow passes through the discharge cavity in a manner of high speed and uniform cycling when flowing through the discharge region. Thus, the discharge quality is guaranteed so as to improve the energy and reliability of the laser.
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