Invention Grant
US09352954B2 Planar cavity MEMS and related structures, methods of manufacture and design structures
有权
平面腔MEMS及相关结构，制造方法和设计结构
- Patent Title: Planar cavity MEMS and related structures, methods of manufacture and design structures
- Patent Title (中): 平面腔MEMS及相关结构，制造方法和设计结构
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Application No.: US14184950Application Date: 2014-02-20
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Publication No.: US09352954B2Publication Date: 2016-05-31
- Inventor: Christopher V. Jahnes , Anthony K. Stamper
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Steven Meyers; Andrew M. Calderon
- Main IPC: H01P1/10
- IPC: H01P1/10 ; B81B3/00 ; H01L41/113 ; B81C1/00 ; H01H57/00 ; G06F17/50 ; H01H1/00 ; H01P1/12
Abstract:
A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.
Public/Granted literature
- US20140166463A1 PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES Public/Granted day:2014-06-19
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