Invention Grant
US09352971B2 Method and apparatus for production of silane and hydrohalosilanes
有权
用于生产硅烷和氢卤代硅烷的方法和装置
- Patent Title: Method and apparatus for production of silane and hydrohalosilanes
- Patent Title (中): 用于生产硅烷和氢卤代硅烷的方法和装置
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Application No.: US13918609Application Date: 2013-06-14
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Publication No.: US09352971B2Publication Date: 2016-05-31
- Inventor: William C. Breneman
- Applicant: REC Silicon Inc
- Applicant Address: US WA Moses Lake
- Assignee: REC Silicon Inc
- Current Assignee: REC Silicon Inc
- Current Assignee Address: US WA Moses Lake
- Agency: Klarquist Sparkman, LLP
- Main IPC: C01B33/00
- IPC: C01B33/00 ; C01B33/04 ; C01B33/08 ; C01B33/10 ; C01B33/107 ; B01D3/00 ; B01J8/00 ; B01J8/02 ; B01J8/04 ; B01J19/00 ; B01J19/24
Abstract:
Silane and hydrohalosilanes of the general formula HySiX4-y (y=1, 2, or 3) are produced by reactive distillation in a system that includes a fixed-bed catalytic redistribution reactor that can be back-flushed during operation.
Public/Granted literature
- US20140369918A1 METHOD AND APPARATUS FOR PRODUCTION OF SILANE AND HYDROHALOSILANES Public/Granted day:2014-12-18
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