Invention Grant
US09353437B2 Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same
有权
二亚乙基基金属化合物,其制备方法以及使用其形成薄膜的方法
- Patent Title: Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same
- Patent Title (中): 二亚乙基基金属化合物,其制备方法以及使用其形成薄膜的方法
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Application No.: US13885740Application Date: 2011-11-17
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Publication No.: US09353437B2Publication Date: 2016-05-31
- Inventor: Won Seok Han
- Applicant: Won Seok Han
- Applicant Address: KR Pyeongtaek-si
- Assignee: UP Chemical Co., Ltd.
- Current Assignee: UP Chemical Co., Ltd.
- Current Assignee Address: KR Pyeongtaek-si
- Agency: Greer Burns & Crain Ltd.
- Priority: KR10-2010-0114515 20101117
- International Application: PCT/KR2011/008791 WO 20111117
- International Announcement: WO2012/067439 WO 20120524
- Main IPC: C23C16/18
- IPC: C23C16/18 ; C07F13/00 ; C07F15/04 ; C07F15/06 ; C23C16/06 ; C23C16/40

Abstract:
The present invention relates to a diazadiene (DAD)-based metal compound, to a method for preparing the same and to a method for forming a thin film using the same. The diazadiene (DAD)-based metal compound of the present invention is provided in a gaseous state to be formed into a metal thin film or a metal oxide thin film by chemical vapor deposition or atomic layer deposition. Particularly, the diazadiene-based organic metal compound of the present invention has advantages in that it may be formed into a metal thin film or a metal oxide thin film and it can be prepared in a relatively inexpensive way without using highly toxic ligands.
Public/Granted literature
- US20130251903A1 DIAZADIENE-BASED METAL COMPOUND, METHOD FOR PREPARING SAME AND METHOD FOR FORMING A THIN FILM USING SAME Public/Granted day:2013-09-26
Information query
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