Invention Grant
US09353437B2 Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same 有权
二亚乙基基金属化合物,其制备方法以及使用其形成薄膜的方法

Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same
Abstract:
The present invention relates to a diazadiene (DAD)-based metal compound, to a method for preparing the same and to a method for forming a thin film using the same. The diazadiene (DAD)-based metal compound of the present invention is provided in a gaseous state to be formed into a metal thin film or a metal oxide thin film by chemical vapor deposition or atomic layer deposition. Particularly, the diazadiene-based organic metal compound of the present invention has advantages in that it may be formed into a metal thin film or a metal oxide thin film and it can be prepared in a relatively inexpensive way without using highly toxic ligands.
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