Invention Grant
- Patent Title: Method for measuring vibration characteristic of cantilever
- Patent Title (中): 测量悬臂振动特性的方法
-
Application No.: US14673372Application Date: 2015-03-30
-
Publication No.: US09354248B2Publication Date: 2016-05-31
- Inventor: Masatsugu Shigeno , Yoshiteru Shikakura
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Brinks Gilson & Lione
- Priority: JP2014-071071 20140331
- Main IPC: G01Q20/00
- IPC: G01Q20/00 ; G01Q10/00 ; G01H1/00

Abstract:
A method for measuring vibration characteristic of a cantilever is proposed in this disclosure. The method includes: measuring vibration amplitude V of a cantilever installed in a scanning probe microscope when vibration with a resonant frequency f1 (Hz) is applied to the cantilever; obtaining a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0; and calculating a Q value by using the following Expression: Q value=f1×Th.
Public/Granted literature
- US20150276796A1 METHOD FOR MEASURING VIBRATION CHARACTERISTIC OF CANTILEVER Public/Granted day:2015-10-01
Information query