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US09354248B2 Method for measuring vibration characteristic of cantilever 有权
测量悬臂振动特性的方法

Method for measuring vibration characteristic of cantilever
Abstract:
A method for measuring vibration characteristic of a cantilever is proposed in this disclosure. The method includes: measuring vibration amplitude V of a cantilever installed in a scanning probe microscope when vibration with a resonant frequency f1 (Hz) is applied to the cantilever; obtaining a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0; and calculating a Q value by using the following Expression: Q value=f1×Th.
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