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公开(公告)号：US10161958B2
公开(公告)日：2018-12-25
申请号：US14794968
申请日：2015-07-09
Applicant: Hitachi High-Tech Science Corporation
Inventor： Masatsugu Shigeno , Kazutoshi Watanabe , Masafumi Watanabe
Abstract: A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.
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公开(公告)号：US20160011231A1
公开(公告)日：2016-01-14
申请号：US14794968
申请日：2015-07-09
Applicant: Hitachi High-Tech Science Corporation
Inventor： Masatsugu Shigeno , Kazutoshi Watanabe , Masafumi Watanabe
IPC: G01Q10/04
Abstract: A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.
Abstract translation: 三维细动装置包括：移动体，固定有移动体的固定部件，固定部件固定于其上的三维细微移动部，能够进行三维细微移动 移动体，其中固定构件插入其间，固定有三维细微移动单元的基座构件，以及移动量检测装置，其固定到基座构件以检测固定构件的移动量。
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公开(公告)号：US10151773B2
公开(公告)日：2018-12-11
申请号：US15468668
申请日：2017-03-24
Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
Inventor： Masatsugu Shigeno , Kazutoshi Watanabe , Masafumi Watanabe , Hiroyoshi Yamamoto , Kazuo Chinone
Abstract: According to this invention, a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.
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公开(公告)号：US09645170B2
公开(公告)日：2017-05-09
申请号：US14671775
申请日：2015-03-27
Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
Inventor： Masatsugu Shigeno
Abstract: A scanning probe microscope includes a cantilever that has a first attachment surface and a cantilever attachment portion that has a second attachment surface to which the first attachment surface of the cantilever is attached. Columnar elements including nanofibers or nanotubes are formed on the second attachment surface, and the second attachment surface adheres to the first attachment surface by using the columnar element.
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公开(公告)号：US20180284151A1
公开(公告)日：2018-10-04
申请号：US15937306
申请日：2018-03-27
Applicant: Hitachi High-Tech Science Corporation
Inventor： Masatsugu Shigeno , Kazutoshi Watanabe , Hiroyoshi Yamamoto
IPC: G01Q10/04
CPC classification number: G01Q10/045 , G01Q60/34
Abstract: A scanning probe microscope has a cantilever having a probe at a tip of the cantilever, a driving unit that performs a separating operation for separating one of the sample and the probe from the other at a speed exceeding a response speed of the cantilever from a state where the probe is in contact with the surface of the sample, a determination unit that determines that the probe is separated from the surface of the sample when vibration of the cantilever at a predetermined amplitude is detected at a resonant frequency of the cantilever during the separating operation, and a driving control unit that stops the separating operation when the determination unit determines that the probe is separated from the surface of the sample and relatively moves the probe and the sample to a position where the probe is located on a next measuring point of the sample.
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Patent Agency Ranking
公开(公告)号：US20170285067A1
公开(公告)日：2017-10-05
申请号：US15468668
申请日：2017-03-24
Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
Inventor： Masatsugu Shigeno , Kazutoshi Watanabe , Masafumi Watanabe , Hiroyoshi Yamamoto , Kazuo Chinone
IPC: G01Q10/02
CPC classification number: G01Q10/02 , G01Q10/065
Abstract: According to this invention, a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.
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公开(公告)号：US09766267B2
公开(公告)日：2017-09-19
申请号：US14221462
申请日：2014-03-21
Applicant: Hitachi High-Tech Science Corporation
Inventor： Masatsugu Shigeno , Shigeru Wakiyama , Masafumi Watanabe , Kazutoshi Watanabe
Abstract: A device for calculating a position of an actuator, the actuator including a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ΔM and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ΔS, where A=ΔS/ΔM≧2, and the device includes a position calculation unit configured to calculating a position SA of the movement mechanism at a target position from the control signal at a time point T1, at which the sensor signal becomes (S0+m×ΔS) or (S0−m×ΔS), where m is a natural number of 1 or more, the control signal at the target position of the movement mechanism is denoted by M0, and the sensor signal is denoted by S0.
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8.发明申请Actuator Position Calculation Device, Actuator Position Calculation Method, and Actuator Position Calculation Program 有权执行器位置计算装置，执行器位置计算方法和执行器位置计算程序公开(公告)号：US20140297222A1
公开(公告)日：2014-10-02
申请号：US14221462
申请日：2014-03-21
Applicant: Hitachi High-Tech Science Corporation
Inventor： Masatsugu Shigeno , Shigeru Wakiyama , Masafumi Watanabe , Kazutoshi Watanabe
Abstract: A device for calculating a position of an actuator, the actuator including a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ΔM and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ΔS, where A=ΔS/ΔM≧2, and the device includes a position calculation unit configured to calculating a position SA of the movement mechanism at a target position from the control signal at a time point T1, at which the sensor signal becomes (S0+m×ΔS) or (S0−m×ΔS), where m is a natural number of 1 or more, the control signal at the target position of the movement mechanism is denoted by M0, and the sensor signal is denoted by S0.
Abstract translation: 一种用于计算致动器的位置的装置，所述致动器包括移动机构，所述移动机构配置成与针对每个最小移动量＆Dgr; M生成的控制信号成比例地沿一个方向移动;移动量检测传感器，被配置为检测运动量 A =＆Dgr; S /＆Dgr;M≥2的最小分辨率＆amp; S的移动机构，并且该装置包括位置计算单元，其被配置为从控制信号计算目标位置处的移动机构的位置SA 在传感器信号变为（S0 + m×＆Dgr; S）或（S0-m×＆Dgr; S）的时间点T1，其中m为1或更大的自然数，则目标位置处的控制信号 运动机构由M0表示，传感器信号由S0表示。
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公开(公告)号：US10345335B2
公开(公告)日：2019-07-09
申请号：US15937306
申请日：2018-03-27
Applicant: Hitachi High-Tech Science Corporation
Inventor： Masatsugu Shigeno , Kazutoshi Watanabe , Hiroyoshi Yamamoto
Abstract: A scanning probe microscope has a cantilever having a probe at a tip of the cantilever, a driving unit that performs a separating operation for separating one of the sample and the probe from the other at a speed exceeding a response speed of the cantilever from a state where the probe is in contact with the surface of the sample, a determination unit that determines that the probe is separated from the surface of the sample when vibration of the cantilever at a predetermined amplitude is detected at a resonant frequency of the cantilever during the separating operation, and a driving control unit that stops the separating operation when the determination unit determines that the probe is separated from the surface of the sample and relatively moves the probe and the sample to a position where the probe is located on a next measuring point of the sample.
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10.发明授权公开(公告)号：US09921241B2
公开(公告)日：2018-03-20
申请号：US15086560
申请日：2016-03-31
Applicant: Hitachi High-Tech Science Corporation
Inventor： Masatsugu Shigeno , Yoshiteru Shikakura
IPC: G01Q30/06
CPC classification number: G01Q30/06
Abstract: A scanning probe microscope has a cantilever having: a probe that is to be contacted or approached on a surface of a sample; and a processor that operates to perform a process including: calculating a measurement width MW and an offset value OV from a minimum value Smin and a maximum value Smax of a signal indicating a displacement of the cantilever with the following Equations (1) and (2) when a prescanning operation is performed before the measurement data is acquired by the probe microscope controller; and adjusting at least one of the offset value OV and the measurement width MW based on a temporal variation of the signal at the same position on the surface of the sample when the prescanning operation is performed. MW=(Smax−Smin) Equation (1) OV=(MW/2)+Smin Equation (2)
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