发明授权
- 专利标题: Reversible top/bottom MEMS package
- 专利标题(中): 可逆顶/底MEMS封装
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申请号: US14659693申请日: 2015-03-17
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公开(公告)号: US09359191B2公开(公告)日: 2016-06-07
- 发明人: David Bolognia , Bob Shih-Wei Kuo , Bud Troche
- 申请人: Amkor Technology, Inc.
- 申请人地址: US AZ Tempe
- 专利权人: Amkor Technology, Inc.
- 当前专利权人: Amkor Technology, Inc.
- 当前专利权人地址: US AZ Tempe
- 代理机构: McAndrews, Held & Malloy
- 主分类号: H01L23/10
- IPC分类号: H01L23/10 ; H01L23/34 ; B81B7/00 ; H01L23/552 ; H01L23/00 ; H01L25/16
摘要:
Methods and systems for a reversible top/bottom MEMS package may comprise a base substrate comprising metal traces, an opening through the base substrate, a die coupled to a first surface of the substrate and positioned over the opening, a frame member coupled to the first surface of the substrate wherein the die is positioned interior of the frame member, a cover substrate coupled to the frame member, and conductive plating on the frame member that electrically couples the base substrate to the cover substrate, wherein the conductive plating is exposed. The conductive plating may couple a ground plane in the base substrate to a ground plane in the cover substrate. The conductive plating may be exposed at an outer surface of the frame member and/or at an inner perimeter of the frame member. Conductive vias within the frame member may be coupled to the metal traces in the base substrate.
公开/授权文献
- US20150191346A1 REVERSIBLE TOP/BOTTOM MEMS PACKAGE 公开/授权日:2015-07-09
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