Invention Grant
US09362099B2 Field asymmetric ion mobility spectrometry filter 有权
场非对称离子迁移谱分析法

Field asymmetric ion mobility spectrometry filter
Abstract:
Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support layer to hold the structure rigidly together after separation of the metal layer into two electrodes.
Public/Granted literature
Information query
Patent Agency Ranking
0/0