Invention Grant
- Patent Title: Optical device, laser apparatus, and extreme ultraviolet light generation system
- Patent Title (中): 光学装置，激光装置和极紫外光发生系统
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Application No.: US14485355Application Date: 2014-09-12
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Publication No.: US09362703B2Publication Date: 2016-06-07
- Inventor: Hakaru Mizoguchi , Takashi Suganuma , Hideo Hoshino , Osamu Wakabayashi
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2011-037703 20110223
- Main IPC: G01C1/00
- IPC: G01C1/00 ; H01S3/00 ; H05G2/00 ; H01S3/10 ; H01S3/13
Abstract:
An optical device may include: an optical module disposed in a beam delivery path of a laser beam; a beam adjusting unit disposed in the beam delivery path for adjusting the beam delivery path of the laser beam; a measuring unit disposed in the beam delivery path for detecting the beam delivery path; and a control unit for controlling the beam adjusting unit based on a detection result of the beam delivery path of the laser beam detected by the measuring unit.
Public/Granted literature
- US20140374605A1 OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM Public/Granted day:2014-12-25
Information query
