发明授权
- 专利标题： Optical device, laser apparatus, and extreme ultraviolet light generation system
- 专利标题（中）： 光学装置，激光装置和极紫外光发生系统
-
申请号： US14485355申请日： 2014-09-12
-
公开(公告)号： US09362703B2公开(公告)日： 2016-06-07
- 发明人: Hakaru Mizoguchi , Takashi Suganuma , Hideo Hoshino , Osamu Wakabayashi
- 申请人： GIGAPHOTON INC.
- 申请人地址： JP Tochigi
- 专利权人： GIGAPHOTON INC.
- 当前专利权人： GIGAPHOTON INC.
- 当前专利权人地址： JP Tochigi
- 代理机构： Studebaker & Brackett PC
- 优先权： JP2011-037703 20110223
- 主分类号： G01C1/00
- IPC分类号： G01C1/00 ; H01S3/00 ; H05G2/00 ; H01S3/10 ; H01S3/13
摘要：
An optical device may include: an optical module disposed in a beam delivery path of a laser beam; a beam adjusting unit disposed in the beam delivery path for adjusting the beam delivery path of the laser beam; a measuring unit disposed in the beam delivery path for detecting the beam delivery path; and a control unit for controlling the beam adjusting unit based on a detection result of the beam delivery path of the laser beam detected by the measuring unit.
公开/授权文献
信息查询
