Invention Grant
- Patent Title: Mounting device and method of manufacturing the same
- Patent Title (中): 安装装置及其制造方法
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Application No.: US14693159Application Date: 2015-04-22
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Publication No.: US09363900B2Publication Date: 2016-06-07
- Inventor: Satoru Takasawa , Shuhei Ichikawa , Isao Sugiura , Satoru Ishibashi , Junichi Nitta
- Applicant: ULVAC, Inc.
- Applicant Address: JP Chigasaki-shi
- Assignee: ULVAC, INC.
- Current Assignee: ULVAC, INC.
- Current Assignee Address: JP Chigasaki-shi
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2013-101616 20130513
- Main IPC: H05K3/16
- IPC: H05K3/16 ; H05K1/11 ; H05K3/18 ; H05K1/03 ; C23F1/02 ; H05K3/06 ; C23C14/20 ; C23C14/34 ; C22C9/06 ; H05K3/38 ; H05K3/46 ; H05K3/10

Abstract:
A mounting device in which a conductive film that is not separated is formed on a resin substrate. Alloy thin films, which contain more than 50% by atom of Cu, 5% by atom or more and 30% by atom or less of Ni, and 3% by atom or more and 10% by atom or less of Al, are formed on a base consisting of a resin so as to be brought into contact with a surface of the base by sputtering. Conductive films consisting of copper are formed on surfaces of the alloy thin films so as to obtain a wiring film having a two-layer structure and a metal plug filled in a connection hole. The alloy thin films have high adhesion to a resin; and hence, the wiring film and the metal plug are not separated.
Public/Granted literature
- US20150230343A1 MOUNTING DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2015-08-13
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