Invention Grant
- Patent Title: Ultrasonic cleaning method and apparatus therefore
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Application No.: US14926575Application Date: 2015-10-29
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Publication No.: US09364870B2Publication Date: 2016-06-14
- Inventor: Evangelos T. Spyropoulos , Iqbal A. Shareef , Clifford Erik La Croix
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Beyer Law Group LLP
- Main IPC: B08B3/12
- IPC: B08B3/12 ; G02B27/00 ; H01J37/32 ; B08B3/10 ; B08B3/04 ; B08B11/04 ; B08B11/00 ; B08B1/00 ; B08B3/00 ; B08B11/02

Abstract:
Ultrasonic cleaning apparatuses and methods of cleaning substantially planar articles. An apparatus comprises (i) a substantially circular tank; (ii) a plurality of cleaning fluid inlets for delivering a cleaning fluid to the tank; (iii) an intermediate support for receiving an article to be cleaned; and (iv) an ultrasonic generator coupled to the tank for generating ultrasonic waves in the tank and cleaning fluid received therein. The apparatus is configured to remove particles from a substantially planar article and have them carried by flow of cleaning fluid away from the article and out of the tank. Using such an apparatus, a cleaning method comprises introducing a substantially planar article to be cleaned into the tank; introducing a cleaning fluid into the tank through the plurality of cleaning fluid inlets; and exciting the cleaning fluid with ultrasonic waves.
Public/Granted literature
- US20160045941A1 ULTRASONIC CLEANING METHOD AND APPARATUS THEREFORE Public/Granted day:2016-02-18
Information query
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