Invention Grant
- Patent Title: Method for producing a micromechanical component, and micromechanical component
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Application No.: US14624071Application Date: 2015-02-17
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Publication No.: US09365410B2Publication Date: 2016-06-14
- Inventor: Dietmar Haberer
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Priority: DE102014202842 20140217
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B81B3/00 ; B81B1/00 ; B81B7/02 ; B81C1/00

Abstract:
A method for producing a micromechanical component, and a micromechanical component, includes providing a substrate having first and second outer surfaces, the second surface facing away from the first surface; forming a through-hole through the substrate from the first outer surface up to the second outer surface; attaching an optical functional layer, on the second outer surface, to cover the through-hole; removing a first segment of the substrate on the first surface of the substrate so that there arises a third outer surface inclined relative to the second surface, the third surface facing away from the second surface, the inclined surface enclosing the through-hole; and separating the micromechanical component by separating a first part of the substrate, having the through-hole, and a second part, attached to the first part, of the optical functional layer from a remaining part of the substrate and a remaining part of the optical functional layer.
Public/Granted literature
- US20150232323A1 Method for producing a micromechanical component, and micromechanical component Public/Granted day:2015-08-20
Information query
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