Invention Grant
US09368531B2 Formation of buried color filters in a back side illuminated image sensor with an ono-like structure 有权
在具有类似结构的背面照明图像传感器中形成掩埋式滤色器

Formation of buried color filters in a back side illuminated image sensor with an ono-like structure
Abstract:
A semiconductor image sensor includes a substrate having a first side and a second side that is opposite the first side. An interconnect structure is disposed over the first side of the substrate. A plurality of radiation-sensing regions is located in the substrate. The radiation-sensing regions are configured to sense radiation that enters the substrate from the second side. A plurality of light-blocking structures is disposed over the second side of the substrate. A passivation layer is coated on top surfaces and sidewalls of each of the light-blocking structures. A plurality of spacers is disposed on portions of the passivation layer coated on the sidewalls of the light-blocking structures.
Information query
Patent Agency Ranking
0/0