Invention Grant
US09368531B2 Formation of buried color filters in a back side illuminated image sensor with an ono-like structure
有权
在具有类似结构的背面照明图像传感器中形成掩埋式滤色器
- Patent Title: Formation of buried color filters in a back side illuminated image sensor with an ono-like structure
- Patent Title (中): 在具有类似结构的背面照明图像传感器中形成掩埋式滤色器
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Application No.: US14308760Application Date: 2014-06-19
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Publication No.: US09368531B2Publication Date: 2016-06-14
- Inventor: Yun-Wei Cheng , Chiu-Jung Chen , Volume Chien , Kuo-Cheng Lee , Yung-Lung Hsu , Hsin-Chi Chen
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A semiconductor image sensor includes a substrate having a first side and a second side that is opposite the first side. An interconnect structure is disposed over the first side of the substrate. A plurality of radiation-sensing regions is located in the substrate. The radiation-sensing regions are configured to sense radiation that enters the substrate from the second side. A plurality of light-blocking structures is disposed over the second side of the substrate. A passivation layer is coated on top surfaces and sidewalls of each of the light-blocking structures. A plurality of spacers is disposed on portions of the passivation layer coated on the sidewalls of the light-blocking structures.
Public/Granted literature
- US20150372030A1 FORMATION OF BURIED COLOR FILTERS IN A BACK SIDE ILLUMINATED IMAGE SENSOR WITH AN ONO-LIKE STRUCTURE Public/Granted day:2015-12-24
Information query
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