Invention Grant
- Patent Title: Resistive memory array and fabricating method thereof
- Patent Title (中): 电阻记忆阵列及其制造方法
-
Application No.: US14087782Application Date: 2013-11-22
-
Publication No.: US09368552B2Publication Date: 2016-06-14
- Inventor: Ku-Feng Lin , Hung-Chang Yu , Kai-Chun Lin , Yue-Der Chih
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
A method of fabricating a resistive memory array includes forming a plurality of insulators and a conductive structure on a first substrate, performing a resistor-forming process to transform the insulators into a plurality of resistors, polishing the conductive structure to expose a plurality of contact points respectively electrically connected to the resistors, providing a second substrate having a plurality of transistors and a plurality of interconnect pads, bonding respectively the interconnect pads and the contact points, and removing the first substrate from the resistors and the conductive structure.
Public/Granted literature
- US20150144860A1 RESISTIVE MEMORY ARRAY AND FABRICATING METHOD THEREOF Public/Granted day:2015-05-28
Information query
IPC分类: