Invention Grant
- Patent Title: Thin film transistor and manufacturing method thereof, array substrate and display device
- Patent Title (中): 薄膜晶体管及其制造方法,阵列基板及显示装置
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Application No.: US14348763Application Date: 2013-07-15
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Publication No.: US09368637B2Publication Date: 2016-06-14
- Inventor: Li Zhang , Chunsheng Jiang , Dongfang Wang , Haijing Chen , Fengjuan Liu
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Ladas & Parry LLP
- Priority: CN201310117218 20130407
- International Application: PCT/CN2013/079346 WO 20130715
- International Announcement: WO2014/166176 WO 20141016
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/12 ; H01L29/66

Abstract:
A thin film transistor (TFT) and manufacturing method thereof, an array substrate and a display device are provided. The thin film transistor comprises a substrate; an active layer formed on the substrate; a first conductive contact layer and a second conductive contact layer formed on the active layer; an etch-stop layer formed over the first contact layer and the second contact layer; and a source connected with the first contact layer, a drain connected with the second contact layer and a gate arranged between the source and the drain formed over the etch-stop layer. The TFT has a simple structure and better performance.
Public/Granted literature
- US20150214373A1 THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, ARRAY SUBSTRATE AND DISPLAY DEVICE Public/Granted day:2015-07-30
Information query
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