发明授权
US09371220B2 Micromechanical component, manufacturing method for a micromechanical component and method for mounting a micromechanical component 有权
微机械部件,微机械部件的制造方法以及安装微机械部件的方法

Micromechanical component, manufacturing method for a micromechanical component and method for mounting a micromechanical component
摘要:
A micromechanical component having a sensor chip is described, on and/or in which at least one sensor element is disposed, and a cladding, formed of an injection-molding material, encloses the sensor chip in such a way that at least one partial area of a surface of the sensor chip is covered in airtight fashion by the injection-molding material. At least one channel is formed in the injection-molding material, which takes a course, straight or not straight, from an outer surrounding area of the cladding toward the at least one sensor element of such a length that a change in shape and/or a change in chemical consistency of at least one part of the at least one sensor element is able to be brought about as a function of at least one physical property and/or at least one chemical partial composition of a medium present in the at least one channel.
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