Invention Grant
- Patent Title: Production method for optical component and optical component
- Patent Title (中): 光学部件和光学部件的制造方法
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Application No.: US14117089Application Date: 2012-04-04
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Publication No.: US09372285B2Publication Date: 2016-06-21
- Inventor: Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori
- Applicant: Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2011-109689 20110516
- International Application: PCT/JP2012/059229 WO 20120404
- International Announcement: WO2012/157358 WO 20121122
- Main IPC: G02B1/10
- IPC: G02B1/10 ; G02B1/115 ; G01B9/02 ; G01J3/453 ; G02B26/06 ; G02B26/08

Abstract:
A method for manufacturing a light transmissive optical component, includes a first etching process of forming a depressed portion by applying etching to a silicon region of a plate-shaped member, a thermal oxidation process of forming a silicon oxide film by thermally oxidizing an inner side surface of the depressed portion, and a nitride film formation process of forming a silicon nitride film that covers the silicon oxide film. Accordingly, it is possible to realize a manufacturing method for an optical component which is capable of uniformly forming a silicon oxide film on a semi-transmissive reflecting surface which is largely inclined (or nearly vertical) with respect to a substrate surface, and an optical component produced by this method.
Public/Granted literature
- US20140104687A1 PRODUCTION METHOD FOR OPTICAL COMPONENT AND OPTICAL COMPONENT Public/Granted day:2014-04-17
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