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公开(公告)号：US09557555B2
公开(公告)日：2017-01-31
申请号：US14117396
申请日：2012-04-04
Applicant: Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori
Inventor： Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori
CPC classification number: G02B26/001 , G01B9/02051 , G01B9/02056 , G01J3/4535 , G01J3/4537 , G02B5/08 , G02B26/0833
Abstract: An optical module includes a first plate-shaped member having a light transmissive optical component which is formed by applying etching to a silicon region, and a second plate-shaped member having light reflective optical components (mirrors) for reflecting light transmitting through the light transmissive optical component. The first and second plate-shaped members are bonded to one another, and an optical path for light transmitting through the light transmissive optical component is along a component forming surface of the first plate-shaped member and a principal surface of the second plate-shaped member. Thereby, realizing an optical module in which it is possible to dispose the light reflective optical component and the light transmissive optical component close to one another, and a manufacturing method for the optical module.
Abstract translation: 光学模块包括具有通过对硅区域进行蚀刻形成的透光光学部件的第一板状部件和具有反射透过透光性的光的反射光学部件（反射镜）的第二板状部件 光学元件。 第一和第二板状构件彼此接合，并且用于透过透光性光学构件的光的光路沿着第一板状构件的构件形成表面，并且第二板状构件的主表面 会员。 由此，实现了可以将光反射型光学部件和透光性光学部件配置成彼此靠近的光学模块，以及光学模块的制造方法。
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公开(公告)号：US20140104687A1
公开(公告)日：2014-04-17
申请号：US14117089
申请日：2012-04-04
Applicant: Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori
Inventor： Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori
IPC: G02B1/11
CPC classification number: G02B1/115 , G01B9/02051 , G01B9/02056 , G01J3/4535 , G02B26/06 , G02B26/0841
Abstract: A method for manufacturing a light transmissive optical component, includes a first etching process of forming a depressed portion by applying etching to a silicon region of a plate-shaped member, a thermal oxidation process of forming a silicon oxide film by thermally oxidizing an inner side surface of the depressed portion, and a nitride film formation process of forming a silicon nitride film that covers the silicon oxide film. Accordingly, it is possible to realize a manufacturing method for an optical component which is capable of uniformly forming a silicon oxide film on a semi-transmissive reflecting surface which is largely inclined (or nearly vertical) with respect to a substrate surface, and an optical component produced by this method.
Abstract translation: 一种透光性光学部件的制造方法，包括通过对板状部件的硅区域进行蚀刻来形成凹部的第一蚀刻工序，通过热氧化内侧形成氧化硅膜的热氧化工序 凹部的表面，以及形成覆盖氧化硅膜的氮化硅膜的氮化膜形成工序。 因此，可以实现能够在相对于基板表面大倾斜（或接近垂直）的半透射反射面上均匀地形成氧化硅膜的光学部件的制造方法， 通过该方法生产的成分。
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公开(公告)号：US09372285B2
公开(公告)日：2016-06-21
申请号：US14117089
申请日：2012-04-04
Applicant: Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori
Inventor： Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori
CPC classification number: G02B1/115 , G01B9/02051 , G01B9/02056 , G01J3/4535 , G02B26/06 , G02B26/0841
Abstract: A method for manufacturing a light transmissive optical component, includes a first etching process of forming a depressed portion by applying etching to a silicon region of a plate-shaped member, a thermal oxidation process of forming a silicon oxide film by thermally oxidizing an inner side surface of the depressed portion, and a nitride film formation process of forming a silicon nitride film that covers the silicon oxide film. Accordingly, it is possible to realize a manufacturing method for an optical component which is capable of uniformly forming a silicon oxide film on a semi-transmissive reflecting surface which is largely inclined (or nearly vertical) with respect to a substrate surface, and an optical component produced by this method.
Abstract translation: 一种透光性光学部件的制造方法，包括通过对板状部件的硅区域进行蚀刻来形成凹部的第一蚀刻工序，通过热氧化内侧形成氧化硅膜的热氧化工序 凹部的表面，以及形成覆盖氧化硅膜的氮化硅膜的氮化膜形成工序。 因此，可以实现能够在相对于基板表面大倾斜（或接近垂直）的半透射反射面上均匀地形成氧化硅膜的光学部件的制造方法， 通过该方法生产的成分。
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公开(公告)号：US20140139924A1
公开(公告)日：2014-05-22
申请号：US14117396
申请日：2012-04-04
Applicant: Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori
Inventor： Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori
CPC classification number: G02B26/001 , G01B9/02051 , G01B9/02056 , G01J3/4535 , G01J3/4537 , G02B5/08 , G02B26/0833
Abstract: An optical module includes a first plate-shaped member having a light transmissive optical component which is formed by applying etching to a silicon region, and a second plate-shaped member having light reflective optical components (mirrors) for reflecting light transmitting through the light transmissive optical component. The first and second plate-shaped members are bonded to one another, and an optical path for light transmitting through the light transmissive optical component is along a component forming surface of the first plate-shaped member and a principal surface of the second plate-shaped member. Thereby, realizing an optical module in which it is possible to dispose the light reflective optical component and the light transmissive optical component close to one another, and a manufacturing method for the optical module.
Abstract translation: 光学模块包括具有通过对硅区域进行蚀刻形成的透光光学部件的第一板状部件和具有反射透过透光性的光的反射光学部件（反射镜）的第二板状部件 光学元件。 第一和第二板状构件彼此接合，并且用于透过透光性光学构件的光的光路沿着第一板状构件的构件形成表面，并且第二板状构件的主表面 会员。 由此，实现了可以将光反射型光学部件和透光性光学部件配置成彼此靠近的光学模块，以及光学模块的制造方法。
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