发明授权
- 专利标题: Epitaxial semiconductor resistor with semiconductor structures on same substrate
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申请号: US14526767申请日: 2014-10-29
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公开(公告)号: US09373637B2公开(公告)日: 2016-06-21
- 发明人: Thomas N. Adam , Kangguo Cheng , Ali Khakifirooz , Alexander Reznicek
- 申请人: GLOBALFOUNDRIES INC.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L27/06 ; H01L29/06 ; H01L29/36 ; H01L29/417 ; H01L49/02 ; H01L21/84 ; H01L27/13
摘要:
An electrical device is provided that includes a substrate having an upper semiconductor layer, a buried dielectric layer and a base semiconductor layer. At least one isolation region is present in the substrate that defines a semiconductor device region and a resistor device region. The semiconductor device region includes a semiconductor device having a back gate structure that is present in the base semiconductor layer. Electrical contact to the back gate structure is provided by doped epitaxial semiconductor pillars that extend through the buried dielectric layer. An epitaxial semiconductor resistor is present in the resistor device region. Undoped epitaxial semiconductor pillars extending from the epitaxial semiconductor resistor to the base semiconductor layer provide a pathway for heat generated by the epitaxial semiconductor resistor to be dissipated to the base semiconductor layer. The undoped and doped epitaxial semiconductor pillars are composed of the same epitaxial semiconductor material.
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