Invention Grant
US09377681B2 Mask manufacturing apparatus and method of manufacturing mask using laser beam 有权
使用激光束制造掩模的掩模制造装置和方法

Mask manufacturing apparatus and method of manufacturing mask using laser beam
Abstract:
A mask manufacturing apparatus includes a laser irradiator, a stage, a frame, and a heat spreader sheet. The laser irradiator divides a laser beam into a plurality of sub-laser beams and irradiates the sub-laser beams to a shadow mask material which is placed over a stage. The frame is disposed over the stage to support the shadow mask material. The heat spreader sheet makes contact with the shadow mask material, absorbs heat generated from the shadow mask material, and dissipates the heat to surroundings of the shadow mask material. Accordingly, the shadow mask material is protected from overheating.
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