Invention Grant
US09377681B2 Mask manufacturing apparatus and method of manufacturing mask using laser beam
有权
使用激光束制造掩模的掩模制造装置和方法
- Patent Title: Mask manufacturing apparatus and method of manufacturing mask using laser beam
- Patent Title (中): 使用激光束制造掩模的掩模制造装置和方法
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Application No.: US14021489Application Date: 2013-09-09
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Publication No.: US09377681B2Publication Date: 2016-06-28
- Inventor: Doh-Hyoung Lee , Jun Ho Jo
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2013-0011956 20130201
- Main IPC: B23K26/00
- IPC: B23K26/00 ; B23K26/16 ; G03F1/76 ; G03F7/20 ; B23K26/067

Abstract:
A mask manufacturing apparatus includes a laser irradiator, a stage, a frame, and a heat spreader sheet. The laser irradiator divides a laser beam into a plurality of sub-laser beams and irradiates the sub-laser beams to a shadow mask material which is placed over a stage. The frame is disposed over the stage to support the shadow mask material. The heat spreader sheet makes contact with the shadow mask material, absorbs heat generated from the shadow mask material, and dissipates the heat to surroundings of the shadow mask material. Accordingly, the shadow mask material is protected from overheating.
Public/Granted literature
- US20140217646A1 MASK MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING MASK USING LASER BEAM Public/Granted day:2014-08-07
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