Invention Grant
US09378926B2 Electron beam lithography methods including time division multiplex loading 有权
电子束光刻方法,包括时分复用加载

Electron beam lithography methods including time division multiplex loading
Abstract:
An embodiment of a method of lithography includes generating a beam of electrons. A first pixel and a second pixel are each configured to pattern the beam. Using time domain multiplex loading, the first and second pixels are controlled such that the beam is patterned. The patterning includes receiving a first clock signal and using the first clock signal to generate a second clock signal and a third clock signal. The second clock signal is sent to the first pixel and sending the third clock signal is sent to the second pixel.
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