Invention Grant
- Patent Title: Electron beam lithography methods including time division multiplex loading
- Patent Title (中): 电子束光刻方法,包括时分复用加载
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Application No.: US14604488Application Date: 2015-01-23
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Publication No.: US09378926B2Publication Date: 2016-06-28
- Inventor: Ming-Zhang Kuo , Ping-Lin Yang , Cheng-Chung Lin , Osamu Takahashi , Sang Hoo Dhong
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Hayne and Boone, LLP
- Main IPC: G21K5/04
- IPC: G21K5/04 ; H01J37/317 ; H01J37/302

Abstract:
An embodiment of a method of lithography includes generating a beam of electrons. A first pixel and a second pixel are each configured to pattern the beam. Using time domain multiplex loading, the first and second pixels are controlled such that the beam is patterned. The patterning includes receiving a first clock signal and using the first clock signal to generate a second clock signal and a third clock signal. The second clock signal is sent to the first pixel and sending the third clock signal is sent to the second pixel.
Public/Granted literature
- US20150131077A1 ELECTRON BEAM LITHOGRAPHY METHODS INCLUDING TIME DIVISION MULTIPLEX LOADING Public/Granted day:2015-05-14
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