发明授权
- 专利标题: Port door positioning apparatus and associated methods
- 专利标题(中): 端口门定位装置及相关方法
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申请号: US14508974申请日: 2014-10-07
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公开(公告)号: US09378995B2公开(公告)日: 2016-06-28
- 发明人: Anthony C. Bonora
- 申请人: Brooks Automation, Inc.
- 申请人地址: US MA Chelmsford
- 专利权人: Brooks Automation, Inc.
- 当前专利权人: Brooks Automation, Inc.
- 当前专利权人地址: US MA Chelmsford
- 代理机构: Martine Penilla Group, LLP
- 主分类号: H01L21/677
- IPC分类号: H01L21/677 ; E06B7/32 ; E06B3/50 ; E06B5/00
摘要:
A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.
公开/授权文献
- US20150021230A1 Port Door Positioning Apparatus and Associated Methods 公开/授权日:2015-01-22
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