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公开(公告)号：US11972965B2
公开(公告)日：2024-04-30
申请号：US17651183
申请日：2022-02-15
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Robert T. Caveney , Bing Yin , Nathan Spiker , Vincent W. Tsang
IPC: H01L21/677 , B25J9/00 , B25J9/10 , B25J9/12 , B25J9/16 , B25J11/00 , G05B19/418 , H01L21/67 , H01L21/68
CPC classification number: H01L21/67742 , B25J9/0027 , B25J9/107 , B25J9/126 , B25J9/1605 , B25J11/0095 , G05B19/4189 , H01L21/67161 , H01L21/67196 , H01L21/681
Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
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公开(公告)号：US11670534B2
公开(公告)日：2023-06-06
申请号：US17158523
申请日：2021-01-26
Applicant: Brooks Automation, Inc.
Inventor： Dana L. Atwood , Jairo Moura
IPC: H01L21/677 , H01L21/687 , G05B19/421 , H01L21/67 , B25J9/16 , G05B19/042
CPC classification number: H01L21/68707 , B25J9/16 , G05B19/421 , H01L21/67167 , H01L21/67196 , H01L21/67201 , H01L21/67253 , H01L21/67276 , H01L21/67706 , H01L21/67742 , G05B19/0423 , G05B2219/2602
Abstract: A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.
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公开(公告)号：US20230029442A9
公开(公告)日：2023-01-26
申请号：US16197107
申请日：2018-11-20
Applicant: Brooks Automation, Inc.
Inventor： Robert T. Caveney , Ulysses Gilchrist , Alexander Krupyshev
IPC: H01L21/677
Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.
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公开(公告)号：US11338437B2
公开(公告)日：2022-05-24
申请号：US17103243
申请日：2020-11-24
Applicant: BROOKS AUTOMATION, INC.
Inventor： Aaron Gawlik , Jairo T. Moura
Abstract: A method for health assessment of a system including a transport apparatus including registering predetermined operating data embodying at least one dynamic performance variable output by the transport apparatus, determining a base value (CpkBase) characterized by a probability density function of each of the dynamic performance variable output, resolving from the transport apparatus in situ process motion commands of the apparatus controller and defining another predetermined motion set of the transport apparatus, registering predetermined operating data embodying the at least one dynamic performance variable output by the transport apparatus and determining with the processor another value (CpkOther) characterized by the probability density function of each of the dynamic performance variable output by the transport apparatus, and comparing the other value and the base value (CpkBase) for each of the dynamic performance variable output by the transport apparatus respectively corresponding to the predetermined motion base set and the other predetermined motion set.
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公开(公告)号：US20220155372A1
公开(公告)日：2022-05-19
申请号：US17534179
申请日：2021-11-23
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Nathan SPIKER , Aaron GAWLIK , Jayaraman KRISHNASAMY
Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
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公开(公告)号：US11273558B2
公开(公告)日：2022-03-15
申请号：US15110130
申请日：2015-01-16
Applicant: BROOKS AUTOMATION, INC.
Inventor： Robert T. Caveney
IPC: H01L21/677 , B25J18/04
Abstract: A transport apparatus including a frame, a drive section connected to the frame, the drive section having at least one drive axis, at least one arm having an end effector configured for holding a substrate, the at least one arm being connected to the drive section by a transmission link and having at least one degree of freedom axis effecting extension and retraction of the end effector with respect to the at least one arm, and a bearing connected to the frame and the end effector, the bearing defining a guideway that defines the at least one degree of freedom axis.
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公开(公告)号：US11267683B2
公开(公告)日：2022-03-08
申请号：US16483294
申请日：2018-02-05
Applicant: Brooks Automation, Inc.
Inventor： Lars Weber Hovendahl , Michael Nielsen , Stig Christensen
Abstract: A capping and de-capping apparatus (100) for capping and de-capping tubes (112) disposed in a tube holding rack (111) having a two-dimensional array of apertures (114) for holding the tubes (112). The apparatus (100) comprises a rack support (110) for supporting the tube holding rack (111), a head unit (120) adapted for carrying a cartridge (152) comprising at least one capping and de-capping gripper (122), a drive system (130) for moving the rack support (110) and the head unit (120) relatively towards and away from one another, in order to cause engagement or disengagement of the capping and de-capping gripper (122) with or from a cap (113) of at least one tube (112), and a drive system (140) for rotating the capping and de-capping gripper (122), wherein rotation in one direction causes attachment of the cap (113) to the tube (112) and rotation in the opposite direction causes detachment of the cap (113) from said tube (112).
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公开(公告)号：US11267649B2
公开(公告)日：2022-03-08
申请号：US16579628
申请日：2019-09-23
Applicant: Brooks Automation, Inc. , MVE BIOLOGICAL SOLUTIONS US
Inventor： Robert T. Caveney , Frank Hunt , Lingchen Sun , Julian D. Warhurst , Bruce S. Zandi , Jeffrey S. Brooks
Abstract: Mounting hardware is installed to a cryogenic storage device to accommodate an automation system for automated storage and retrieval. A guideplate at an upper surface of a cover of the cryogenic storage device is positioned such that the guideplate is aligned in a predefined relation to an access port at the upper surface. One or more mounting posts are affixed at a location as indicated by the guideplate. A vacuum is then pulled within the cover, and the mounting hardware is affixed to the at least one mounting post.
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公开(公告)号：US11201073B2
公开(公告)日：2021-12-14
申请号：US14469260
申请日：2014-08-26
Applicant: Brooks Automation, Inc.
Inventor： Ulysses Gilchrist
IPC: H01L21/67 , H01L21/677 , B25J9/04 , B25J18/04
Abstract: A substrate processing apparatus comprising a transport arm having serially connected arm links, at least one of the arm links having a predetermined arm link height, at least a first pulley and a second pulley, where the second pulley is fixed to an arm link of the serially connected arm links, and at least one torque transmission band extending longitudinally between and coupled to each of the first pulley and the second pulley, the at least one torque transmission band having a corresponding band height for the predetermined arm link height and a variable lateral thickness such that the at least one torque transmission band includes a segment of laterally increased cross section for the corresponding band height.
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公开(公告)号：US11164769B2
公开(公告)日：2021-11-02
申请号：US16942255
申请日：2020-07-29
Applicant: BROOKS AUTOMATION, INC.
Inventor： Jairo Terra Moura
Abstract: A substrate transport apparatus includes a transport chamber, a drive section, a robot arm, an imaging system with a camera mounted through a mounting interface of the drive section in a predetermined location with respect to the transport chamber and disposed to image part of the arm, and a controller connected to the imaging system and configured to image, with the camera, the arm moving to or in the predetermined location, the controller effecting capture of a first image of the arm on registry of the arm proximate to or in the predetermined location, the controller is configured to calculate a positional variance of the arm from comparison of the first image with a calibration image of the arm, and determine a motion compensation factor changing an extended position of the arm. Each camera effecting capture of the first image is disposed inside the perimeter of the mounting interface.
