Invention Grant
US09379123B2 Semiconductor memory devices and methods of fabricating the same 有权
半导体存储器件及其制造方法

Semiconductor memory devices and methods of fabricating the same
Abstract:
Provided are a semiconductor memory device and a method of fabricating the same. the semiconductor memory device may include a semiconductor substrate with a first trench defining active regions in a first region and a second trench provided in a second region around the first region, a gate electrode provided on the first region to cross the active regions, a charge storing pattern disposed between the gate electrode and the active regions, a blocking insulating layer provided between the gate electrode and the charge storing pattern and extending over the first trench to define a first air gap in the first trench, and an insulating pattern provided spaced apart from a bottom surface of the second trench to define a second air gap in the second trench.
Public/Granted literature
Information query
Patent Agency Ranking
0/0