- Patent Title: Ionization gauge with emission current and bias potential control
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Application No.: US14582750Application Date: 2014-12-24
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Publication No.: US09383286B2Publication Date: 2016-07-05
- Inventor: Larry K. Carmichael , Jesse A. Weber , John H. Henry , Michael N. Schott , Gerardo A. Brucker
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G01L21/30
- IPC: G01L21/30 ; H01J41/02 ; G01N27/60 ; G01N27/62 ; G01L21/32

Abstract:
An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.
Public/Granted literature
- US20150108993A1 Ionization Gauge With Emission Current and Bias Potential Control Public/Granted day:2015-04-23
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