发明授权
- 专利标题: Automated atomic force microscope and the operation thereof
- 专利标题(中): 自动原子力显微镜及其操作
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申请号: US14692270申请日: 2015-04-21
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公开(公告)号: US09383388B2公开(公告)日: 2016-07-05
- 发明人: Roger Proksch , Roger C. Callahan , Frank Stetter , Ted Limpoco , Sophia Hohlbach , Jason Bemis , Jason Cleveland
- 申请人: Oxford Instruments Asylum Research, Inc.
- 申请人地址: US CA Goleta
- 专利权人: Oxford Instruments Asylum Research, Inc
- 当前专利权人: Oxford Instruments Asylum Research, Inc
- 当前专利权人地址: US CA Goleta
- 代理机构: Law Office of Scott C Harris, Inc
- 主分类号: G01Q60/24
- IPC分类号: G01Q60/24 ; G01Q70/08 ; G01Q40/00 ; G01Q60/32 ; G01Q10/06
摘要:
Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.
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