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公开(公告)号：US09921242B2
公开(公告)日：2018-03-20
申请号：US15202445
申请日：2016-07-05
发明人： Roger Proksch , Roger C. Callahan , Frank Stetter , Ted Limpoco , Sophia Hohlbauch , Jason Bemis , Jason Cleveland , Nicholas Geiss
CPC分类号： G01Q60/24 , G01Q10/065 , G01Q40/00 , G01Q60/32 , G01Q70/08
摘要： Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.
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公开(公告)号：US20160313369A1
公开(公告)日：2016-10-27
申请号：US15202445
申请日：2016-07-05
发明人： Roger Proksch , Roger C. Callahan , Frank Stetter , Ted Limpoco , Sophia Hohlbauch , Jason Bemis , Jason Cleveland
IPC分类号： G01Q60/24
CPC分类号： G01Q60/24 , G01Q10/065 , G01Q40/00 , G01Q60/32 , G01Q70/08
摘要： Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.
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公开(公告)号：US20150301080A1
公开(公告)日：2015-10-22
申请号：US14692270
申请日：2015-04-21
发明人： Roger Proksch , Roger C. Callahan , Frank Stetter , Ted Limpoco , Sophia Hohlbach , Jason Bemis , Jason Cleveland
CPC分类号： G01Q60/24 , G01Q10/065 , G01Q40/00 , G01Q60/32 , G01Q70/08
摘要： Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.
摘要翻译： 公开了快速校准和自动操作扫描探针显微镜的改进。 SPM的中心部件是力传感器，通常是消耗性悬臂元件。 通过自动校准传感器特性以及其他仪器参数，可以快速，轻松地优化扫描参数，从而实现高通量，可重复和准确的测量。 与动态优化方案相比，这可以在表面接触之前完成，从测量过程开始就避免尖端或样品损坏。
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公开(公告)号：US09383388B2
公开(公告)日：2016-07-05
申请号：US14692270
申请日：2015-04-21
发明人： Roger Proksch , Roger C. Callahan , Frank Stetter , Ted Limpoco , Sophia Hohlbach , Jason Bemis , Jason Cleveland
CPC分类号： G01Q60/24 , G01Q10/065 , G01Q40/00 , G01Q60/32 , G01Q70/08
摘要： Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.
摘要翻译： 公开了快速校准和自动操作扫描探针显微镜的改进。 SPM的中心部件是力传感器，通常是消耗性悬臂元件。 通过自动校准传感器特性以及其他仪器参数，可以快速，轻松地优化扫描参数，从而实现高通量，可重复和准确的测量。 与动态优化方案相比，这可以在表面接触之前完成，从测量过程开始就避免尖端或样品损坏。
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