发明授权
- 专利标题： Apparatus and methods for handling workpieces of different sizes
- 专利标题（中）： 用于处理不同尺寸工件的装置和方法
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申请号： US13567507申请日： 2012-08-06
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公开(公告)号： US09385017B2公开(公告)日： 2016-07-05
- 发明人: James P. Fazio , David K. Foote , James D. Getty
- 申请人： James P. Fazio , David K. Foote , James D. Getty
- 申请人地址： US OH Westlake
- 专利权人： Nordson Corporation
- 当前专利权人： Nordson Corporation
- 当前专利权人地址： US OH Westlake
- 代理机构： Baker & Hostetler LLP
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; H01L21/687 ; C23C16/458
摘要：
Apparatus and methods for plasma processing workpieces of different diameters. The apparatus includes a lift plate having an outer perimeter, an opening inside of the outer perimeter, and a gap extending between the opening and the outer perimeter. The lift plate includes annular rims of different inner diameters and that are configured to respectively support the first and second workpieces.
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