Invention Grant
- Patent Title: Resonator and fabricating method thereof
- Patent Title (中): 谐振器及其制造方法
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Application No.: US14073509Application Date: 2013-11-06
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Publication No.: US09385303B2Publication Date: 2016-07-05
- Inventor: In Sang Song , Ho Soo Park , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Moon Chul Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2013-0006898 20130122
- Main IPC: H03H9/15
- IPC: H03H9/15 ; H03H9/00 ; H01L41/22 ; H01L41/314 ; H03H9/13 ; H03H9/17
Abstract:
Provided are a resonator and a method of fabricating the same. The resonator may include a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a control layer disposed on the second electrode and having a frame with an uneven surface.
Public/Granted literature
- US20140203686A1 RESONATOR AND FABRICATING METHOD THEREOF Public/Granted day:2014-07-24
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