Invention Grant
US09387552B2 Laser annealing apparatus and laser annealing method using the same
有权
激光退火装置和使用其的激光退火方法
- Patent Title: Laser annealing apparatus and laser annealing method using the same
- Patent Title (中): 激光退火装置和使用其的激光退火方法
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Application No.: US14697444Application Date: 2015-04-27
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Publication No.: US09387552B2Publication Date: 2016-07-12
- Inventor: Joo Woan Cho , Sanghoon Ahn , Byoungho Cheong , Byoung Kwon Choo
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2014-0089056 20140715
- Main IPC: H01L21/02
- IPC: H01L21/02 ; G02B27/14 ; G02B26/08 ; B23K26/06 ; B23K26/067 ; C21D9/50 ; H01L21/268
Abstract:
A laser annealing apparatus includes a beam splitter that splits a laser beam emitted from a laser source into a reflection light beam and a transmission light beam, a beam vibrator that makes an irradiation point of the reflection light beam or the transmission light beam vibrate in a predetermined direction, a beam inverter that inverts the reflection light beam or the transmission light beam, and a light collector that collects the reflection light and the transmission light.
Public/Granted literature
- US20160020097A1 LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD USING THE SAME Public/Granted day:2016-01-21
Information query
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