公开(公告)号：US20160020097A1

公开(公告)日：2016-01-21

申请号：US14697444

申请日：2015-04-27

Applicant: Samsung Display Co., Ltd.

Inventor： Joo Woan Cho ,  Sanghoon Ahn ,  Byoungho Cheong ,  Byoung Kwon Choo

IPC: H01L21/02 ,  B23K26/062 ,  B23K26/067 ,  B23K26/06 ,  G02B27/14 ,  G02B26/08

CPC classification number: B23K26/062 ,  B23K26/0604 ,  B23K26/0643 ,  B23K26/0665 ,  B23K26/0676 ,  B23K26/082 ,  B23K26/352 ,  B23K2101/40 ,  C21D9/50 ,  G02B26/08 ,  G02B27/0905 ,  G02B27/0933 ,  G02B27/145 ,  G02B27/146 ,  H01L21/268

Abstract: A laser annealing apparatus includes a beam splitter that splits a laser beam emitted from a laser source into a reflection light beam and a transmission light beam, a beam vibrator that makes an irradiation point of the reflection light beam or the transmission light beam vibrate in a predetermined direction, a beam inverter that inverts the reflection light beam or the transmission light beam, and a light collector that collects the reflection light and the transmission light.

Abstract translation: 激光退火装置包括将从激光源发射的激光束分解为反射光束和透射光束的分束器，使反射光束或透射光束的照射点振动的光束振动器 预定方向，反射反射光束或透射光束的光束反射器，以及收集反射光和透射光的集光器。

公开(公告)号：US09969047B2

公开(公告)日：2018-05-15

申请号：US15138630

申请日：2016-04-26

Applicant: Samsung Display Co., Ltd.

Inventor： Joowoan Cho ,  Hyunjin Cho ,  Byoungkwon Choo ,  Oleg Prudnikov ,  Jeongkyun Na ,  Sanghoon Ahn ,  Seunghwan Lee ,  Byoungho Cheong

IPC: B24B37/20

CPC classification number: B24B37/20 ,  B24B27/0015 ,  B24B27/0076 ,  B24B37/10

Abstract: A substrate polishing apparatus includes a support part on which at least one substrate is disposed, a plurality of first moving parts disposed at both opposite sides of the support part in a second direction crossing a first direction, and configured to upwardly extend and reciprocate in the first direction, a second moving part disposed between the plurality of first moving parts in the second direction and connected to an upper side of the first moving parts, a plurality of polishing units disposed at a lower portion of the second moving part and configured to contact an upper surface of the substrate, and a plurality of nozzles disposed at the lower portion of the second moving part and configured to spray slurry to the substrate where the polishing units rotate and revolve along a predetermined trajectory.

公开(公告)号：US09460922B1

公开(公告)日：2016-10-04

申请号：US14937068

申请日：2015-11-10

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sanghoon Ahn ,  Byoungkwon Choo ,  Byoungho Cheong ,  Jeongkyun Na ,  Seung Hwan Lee ,  Joowoan Cho ,  Hyunjin Cho ,  Oleg Prudnikov

IPC: H01L21/331 ,  H01L21/02 ,  G02B27/28

CPC classification number: H01L21/02675 ,  B23K26/0604 ,  B23K26/0676 ,  B23K26/352 ,  B23K2103/56 ,  G02B27/283 ,  G02B27/286 ,  H01L21/268

Abstract: A method of manufacturing a display apparatus includes forming an amorphous silicon layer on a substrate, splitting a first laser beam emitted from a first laser source into a first master beam in a first polarization state and a second master beam in a second polarization state, changing the first polarization state of the first master beam to the second polarization state to output a third master beam having the second polarization state and corresponding to the first master beam having the second polarization state, combining the second master beam with the third master beam to output a merged laser beam, and irradiating the amorphous silicon layer with the merged laser beam to form a polysilicon layer.

Abstract translation: 制造显示装置的方法包括在基板上形成非晶硅层，将从第一激光源发射的第一激光束分成第一偏振态的第一主光束和第二偏振状态的第二主光束， 将第一主光束的第一偏振状态转换到第二偏振状态，以输出具有第二偏振状态并对应于具有第二偏振状态的第一主光束的第三主光束，将第二主光束与第三主光束组合以输出 合并的激光束，并且用合并的激光束照射非晶硅层以形成多晶硅层。

公开(公告)号：US20160284546A1

公开(公告)日：2016-09-29

申请号：US14857302

申请日：2015-09-17

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Joowoan Cho ,  Byoungho Cheong ,  Byoungkwon Choo ,  Jeongkyun Na ,  Sanghoon Ahn ,  Hyunjin Cho

IPC: H01L21/02 ,  H01L29/16 ,  H01L29/66 ,  H01L29/04

CPC classification number: H01L21/02675 ,  B23K26/00 ,  B23K26/0608 ,  B23K26/0643 ,  B23K26/352 ,  H01L21/02532 ,  H01L21/02691 ,  H01L27/1285 ,  H01L29/04 ,  H01L29/16 ,  H01L29/1604 ,  H01L29/6675 ,  H01L29/66757 ,  Y02P70/605

Abstract: A method of manufacturing a substrate includes: irradiating, along a first path, a laser beam emitted from a source onto a substrate, wherein the substrate includes a target layer of the laser beam, and wherein the substrate is disposed on a stage; and irradiating, along a second path, a portion the laser beam, which was emitted from the source and reached the target layer, by reflecting the laser beam back onto the target layer using a reflection mirror. An area of a second region of the target layer is greater than an area of a first region of the target layer, wherein the laser beam is irradiated along the second path in the second region, and the laser beam is irradiated along the first path in the first region.

Abstract translation: 一种制造衬底的方法包括：沿着第一路径照射从源发射到衬底上的激光束，其中衬底包括激光束的目标层，并且其中衬底设置在平台上; 并且通过使用反射镜将激光束反射回目标层，沿着第二路径照射从源发射并到达目标层的激光束的一部分。 目标层的第二区域的面积大于目标层的第一区域的面积，其中沿第二区域的第二路径照射激光束，沿着第一路径照射激光束 第一个地区。

公开(公告)号：US09829712B2

公开(公告)日：2017-11-28

申请号：US14800547

申请日：2015-07-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Joowoan Cho ,  Sanghoon Ahn ,  Byoungho Cheong ,  Byoungkwon Choo

IPC: H01L21/02 ,  G02B27/09 ,  H01S3/00 ,  G02B27/14 ,  G02B26/08 ,  B23K26/08 ,  B23K26/00 ,  B23K26/06 ,  B23K26/067 ,  B23K26/352 ,  B23K101/40

CPC classification number: G02B27/0927 ,  B23K26/0006 ,  B23K26/0608 ,  B23K26/0643 ,  B23K26/067 ,  B23K26/352 ,  B23K2101/40 ,  G02B26/0816 ,  G02B27/0905 ,  G02B27/0977 ,  G02B27/144 ,  H01S3/005 ,  H01S3/0071

Abstract: A laser optical system including: a beam splitter configured to split a laser beam into a first light and a second light by reflecting a portion of the laser beam and transmitting another portion of the laser beam; a first reflective member located in a path of the first light and reflecting the first light; and a second reflective member located in a path of the first light and reflecting the first light toward the beam splitter after the first light is reflected by the first reflective member, wherein a portion of the first light reflected toward the beam splitter is incident on and passes through the beam splitter and at least partially overlaps the second light.

公开(公告)号：US09387552B2

公开(公告)日：2016-07-12

申请号：US14697444

申请日：2015-04-27

Applicant: Samsung Display Co., Ltd.

Inventor： Joo Woan Cho ,  Sanghoon Ahn ,  Byoungho Cheong ,  Byoung Kwon Choo

IPC: H01L21/02 ,  G02B27/14 ,  G02B26/08 ,  B23K26/06 ,  B23K26/067 ,  C21D9/50 ,  H01L21/268

CPC classification number: B23K26/062 ,  B23K26/0604 ,  B23K26/0643 ,  B23K26/0665 ,  B23K26/0676 ,  B23K26/082 ,  B23K26/352 ,  B23K2101/40 ,  C21D9/50 ,  G02B26/08 ,  G02B27/0905 ,  G02B27/0933 ,  G02B27/145 ,  G02B27/146 ,  H01L21/268

Abstract: A laser annealing apparatus includes a beam splitter that splits a laser beam emitted from a laser source into a reflection light beam and a transmission light beam, a beam vibrator that makes an irradiation point of the reflection light beam or the transmission light beam vibrate in a predetermined direction, a beam inverter that inverts the reflection light beam or the transmission light beam, and a light collector that collects the reflection light and the transmission light.

Abstract translation: 激光退火装置包括将从激光源发射的激光束分解为反射光束和透射光束的分束器，使反射光束或透射光束的照射点振动的光束振动器 预定方向，反射反射光束或透射光束的光束反射器，以及收集反射光和透射光的集光器。

公开(公告)号：US09786499B2

公开(公告)日：2017-10-10

申请号：US15460612

申请日：2017-03-16

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Joowoan Cho ,  Byoungho Cheong ,  Byoungkwon Choo ,  Jeongkyun Na ,  Sanghoon Ahn ,  Hyunjin Cho

IPC: H01L21/02 ,  H01L29/04 ,  H01L29/16 ,  H01L29/66

CPC classification number: H01L21/02675 ,  B23K26/00 ,  B23K26/0608 ,  B23K26/0643 ,  B23K26/352 ,  H01L21/02532 ,  H01L21/02691 ,  H01L27/1285 ,  H01L29/04 ,  H01L29/16 ,  H01L29/1604 ,  H01L29/6675 ,  H01L29/66757 ,  Y02P70/605

Abstract: A method of manufacturing a substrate includes: irradiating, along a first path, a laser beam emitted from a source onto a substrate, wherein the substrate includes a target layer of the laser beam, and wherein the substrate is disposed on a stage; and irradiating, along a second path, a portion the laser beam, which was emitted from the source and reached the target layer, by reflecting the laser beam back onto the target layer using a reflection mirror. An area of a second region of the target layer is greater than an area of a first region of the target layer, wherein the laser beam is irradiated along the second path in the second region, and the laser beam is irradiated along the first path in the first region.

公开(公告)号：US09633845B2

公开(公告)日：2017-04-25

申请号：US14857302

申请日：2015-09-17

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Joowoan Cho ,  Byoungho Cheong ,  Byoungkwon Choo ,  Jeongkyun Na ,  Sanghoon Ahn ,  Hyunjin Cho

IPC: H01L21/02 ,  H01L29/04 ,  H01L29/16 ,  H01L29/66 ,  B23K26/00

CPC classification number: H01L21/02675 ,  B23K26/00 ,  B23K26/0608 ,  B23K26/0643 ,  B23K26/352 ,  H01L21/02532 ,  H01L21/02691 ,  H01L27/1285 ,  H01L29/04 ,  H01L29/16 ,  H01L29/1604 ,  H01L29/6675 ,  H01L29/66757 ,  Y02P70/605

Abstract: A method of manufacturing a substrate includes: irradiating, along a first path, a laser beam emitted from a source onto a substrate, wherein the substrate includes a target layer of the laser beam, and wherein the substrate is disposed on a stage; and irradiating, along a second path, a portion the laser beam, which was emitted from the source and reached the target layer, by reflecting the laser beam back onto the target layer using a reflection mirror. An area of a second region of the target layer is greater than an area of a first region of the target layer, wherein the laser beam is irradiated along the second path in the second region, and the laser beam is irradiated along the first path in the first region.

公开(公告)号：US20160252732A1

公开(公告)日：2016-09-01

申请号：US14800547

申请日：2015-07-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Joowoan Cho ,  Sanghoon Ahn ,  Byoungho Cheong ,  Byoungkwon Choo

IPC: G02B27/09 ,  B23K26/08 ,  G02B26/08 ,  H01S3/00 ,  G02B27/14

CPC classification number: G02B27/0927 ,  B23K26/0006 ,  B23K26/0608 ,  B23K26/0643 ,  B23K26/067 ,  B23K26/352 ,  B23K2101/40 ,  G02B26/0816 ,  G02B27/0905 ,  G02B27/0977 ,  G02B27/144 ,  H01S3/005 ,  H01S3/0071

Abstract: A laser optical system including: a beam splitter configured to split a laser beam into a first light and a second light by reflecting a portion of the laser beam and transmitting another portion of the laser beam; a first reflective member located in a path of the first light and reflecting the first light; and a second reflective member located in a path of the first light and reflecting the first light toward the beam splitter after the first light is reflected by the first reflective member, wherein a portion of the first light reflected toward the beam splitter is incident on and passes through the beam splitter and at least partially overlaps the second light.

Abstract translation: 一种激光光学系统，包括：分束器，其被配置为通过反射所述激光束的一部分并且传输所述激光束的另一部分来将激光束分裂成第一光和第二光; 位于所述第一光的路径中并反射所述第一光的第一反射构件; 以及第二反射构件，位于所述第一光的路径中，并且在所述第一光被所述第一反射构件反射之后，将所述第一光反射到所述分束器，其中朝向所述分束器反射的所述第一光的一部分入射， 通过分束器并且至少部分地与第二光重叠。