Invention Grant
- Patent Title: Acceleration sensor
- Patent Title (中): 加速度传感器
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Application No.: US13899204Application Date: 2013-05-21
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Publication No.: US09389241B2Publication Date: 2016-07-12
- Inventor: Jong Woon Kim , Jun Lim , Seung Mo Lim , Sang Jin Kim
- Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2012-0058487 20120531
- Main IPC: G01C19/00
- IPC: G01C19/00 ; G01P3/44 ; G01C19/56 ; G01P15/09 ; G01P15/12 ; G01P15/08

Abstract:
Disclosed herein is a sensor. A sensor according to the present invention includes a mass body, a fixing part disposed so as to be spaced apart from the mass body, a first flexible part connecting the mass body with the fixing part in a Y-axis direction, a second flexible part connecting the mass body with the fixing part in an X-axis direction, and a membrane disposed over the second flexible part and having a width in a Y-axis direction larger than a width in a Y-axis direction of the second flexible part. Here, a width of an X-axis direction of the first flexible part is larger than a thickness in a Z-axis direction thereof and a thickness in a Z-axis direction of the second flexible part is larger than a width in a Y-axis direction thereof.
Public/Granted literature
- US20130319115A1 SENSOR Public/Granted day:2013-12-05
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