Invention Grant
US09391042B2 Micro device transfer system with pivot mount 有权
带枢轴安装的微型设备传输系统

Micro device transfer system with pivot mount
Abstract:
Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a micro pick up array mount includes a pivot platform to allow a micro pick up array to automatically align with a carrier substrate. Deflection of the pivot platform may be detected to control further movement of the micro pick up array.
Public/Granted literature
Information query
Patent Agency Ranking
0/0