发明授权
US09391077B2 SiGe and Si FinFET structures and methods for making the same
有权
SiGe和Si FinFET结构及其制造方法
- 专利标题: SiGe and Si FinFET structures and methods for making the same
- 专利标题(中): SiGe和Si FinFET结构及其制造方法
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申请号: US14176575申请日: 2014-02-10
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公开(公告)号: US09391077B2公开(公告)日: 2016-07-12
- 发明人: Kangguo Cheng , Bruce B. Doris , Pouya Hashemi , Ali Khakifirooz , Alexander Reznicek
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 L. Jeffrey Kelly; Steven Meyers
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01L27/092 ; H01L29/16 ; H01L29/161 ; H01L21/8238
摘要:
FinFET structures and methods for making the same. A method includes: creating a plurality of Silicon fins on a first region of a substrate, creating a plurality of Silicon-Germanium fins on a second region of the substrate, adjusting a Silicon fin pitch of the plurality of Silicon fins to a predetermined value, and adjusting a Silicon-Germanium fin pitch of the plurality of Silicon-Germanium fins to a predetermined value, where the creating steps are performed in a manner that Silicon material and Silicon-Germanium material used in making the plurality of fins will be on the semiconductor structure at a same time.
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