Invention Grant
- Patent Title: Manufacturing method of a thin film transistor utilizing a pressing mold and active-matrix display devices made therefrom
- Patent Title (中): 利用压模的薄膜晶体管的制造方法和由其制成的有源矩阵显示装置
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Application No.: US14025777Application Date: 2013-09-12
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Publication No.: US09391168B2Publication Date: 2016-07-12
- Inventor: Jung-Hun Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2012-0103197 20120918; KR10-2012-0103204 20120918; KR10-2013-0096429 20130814
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L35/24 ; H01L51/00 ; H01L29/66 ; H01L29/786 ; H01L29/423 ; H01L27/12

Abstract:
A manufacturing method of an electronic device simplifies the process by performing a patterning process by using an imprinting technology. An electronic device manufactured by the manufacturing method is also disclosed. In one embodiment, the electronic device includes a substrate provided to have a dented portion and a non-dented portion, a gate electrode located at and in direct contact with the dented portion of the substrate, a source electrode and a drain electrode located at the non-dented portion of the substrate, and a semiconductor layer located on the gate electrode and in contact with the source electrode and the drain electrode. The gate electrode, the source electrode, and the drain electrode are formed of at least one of molybdenum, tungsten, copper, aluminum, titanium, an alloy thereof, nanowire, graphene, carbon nanotube, indium tin oxide, indium zinc oxide and combinations thereof.
Public/Granted literature
- US20140077193A1 MANUFACTURING METHOD OF ELECTRONIC DEVICE USING IMPRINTING AND ELECTRONIC DEVICE MADE THEREFROM Public/Granted day:2014-03-20
Information query
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