Invention Grant
- Patent Title: MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer
- Patent Title (中): MEMS振动结构采用取向依赖单晶压电薄膜层
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Application No.: US14031383Application Date: 2013-09-19
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Publication No.: US09391588B2Publication Date: 2016-07-12
- Inventor: Kushal Bhattacharjee , Sergei Zhgoon
- Applicant: RF Micro Devices, Inc.
- Applicant Address: US NC Greensboro
- Assignee: RF Micro Devices, Inc.
- Current Assignee: RF Micro Devices, Inc.
- Current Assignee Address: US NC Greensboro
- Agency: Withrow & Terranova, P.L.L.C.
- Main IPC: H01L41/053
- IPC: H01L41/053 ; H01L41/047 ; H03H9/25 ; H03H9/125 ; H03H9/15 ; C04B35/00 ; H03H9/17

Abstract:
A micro-electrical-mechanical system (MEMS) vibrating structure includes a carrier substrate, a first anchor, a second anchor, a single crystal piezoelectric body, and a conducting layer. The first anchor and the second anchor are provided on the surface of the carrier substrate. The single-crystal piezoelectric body is suspended between the first anchor and the second anchor, and includes a uniform crystalline orientation defined by a set of Euler angles. The single-crystal piezoelectric body includes a first surface parallel to and facing the surface of the carrier substrate on which the first anchor and the second anchor are formed and a second surface opposite the first surface. The conducting layer is inter-digitally dispersed, and is formed on the second surface of the single-crystal piezoelectric body. The first surface of the single-crystal piezoelectric body is left exposed.
Public/Granted literature
- US20140210314A1 MEMS VIBRATING STRUCTURE USING AN ORIENTATION DEPENDENT SINGLE-CRYSTAL PIEZOELECTRIC THIN FILM LAYER Public/Granted day:2014-07-31
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