公开(公告)号：US09391588B2

公开(公告)日：2016-07-12

申请号：US14031383

申请日：2013-09-19

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee ,  Sergei Zhgoon

IPC: H01L41/053 ,  H01L41/047 ,  H03H9/25 ,  H03H9/125 ,  H03H9/15 ,  C04B35/00 ,  H03H9/17

CPC classification number: H03H9/17 ,  H03H2009/155

Abstract: A micro-electrical-mechanical system (MEMS) vibrating structure includes a carrier substrate, a first anchor, a second anchor, a single crystal piezoelectric body, and a conducting layer. The first anchor and the second anchor are provided on the surface of the carrier substrate. The single-crystal piezoelectric body is suspended between the first anchor and the second anchor, and includes a uniform crystalline orientation defined by a set of Euler angles. The single-crystal piezoelectric body includes a first surface parallel to and facing the surface of the carrier substrate on which the first anchor and the second anchor are formed and a second surface opposite the first surface. The conducting layer is inter-digitally dispersed, and is formed on the second surface of the single-crystal piezoelectric body. The first surface of the single-crystal piezoelectric body is left exposed.

Abstract translation: 微机电系统（MEMS）振动结构包括载体基板，第一锚固件，第二锚固件，单晶体压电体和导电层。 第一锚固件和第二锚固件设置在载体基板的表面上。 单晶压电体悬挂在第一锚和第二锚之间，并且包括由一组欧拉角定义的均匀结晶取向。 单晶体压电体包括平行于并面向其上形成有第一锚和第二锚的载体基板的表面的第一表面和与第一表面相对的第二表面。 导电层是数字间分散的，并且形成在单晶体压电体的第二表面上。 单晶体压电体的第一面露出。

公开(公告)号：US20140210315A1

公开(公告)日：2014-07-31

申请号：US14031454

申请日：2013-09-19

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee ,  Sergei Zhgoon

IPC: H03H9/17

CPC classification number: H03H9/17 ,  H03H2009/155

Abstract: A micro-electrical-mechanical system (MEMS) vibrating structure includes a carrier substrate, a first anchor, a second anchor, a single crystal piezoelectric body, a first conducting layer, and a second conducting layer. The first anchor and the second anchor are provided on the surface of the carrier substrate. The single-crystal piezoelectric body is suspended between the first anchor and the second anchor, and includes a uniform crystalline orientation defined by a set of Euler angles. The single-crystal piezoelectric body includes a first surface parallel to and facing the surface of the carrier substrate on which the first anchor and the second anchor are formed and a second surface opposite the first surface. The first conducting layer is inter-digitally dispersed on the second surface of the single-crystal piezoelectric body. The second conducting layer is inter-digitally dispersed on the first surface of the single-crystal piezoelectric body.

Abstract translation: 微电气机械系统（MEMS）振动结构包括载体基板，第一锚固件，第二锚固件，单晶体压电体，第一导电层和第二导电层。 第一锚固件和第二锚固件设置在载体基板的表面上。 单晶压电体悬挂在第一锚和第二锚之间，并且包括由一组欧拉角定义的均匀结晶取向。 单晶体压电体包括平行于并面向其上形成有第一锚和第二锚的载体基板的表面的第一表面和与第一表面相对的第二表面。 第一导电层以数字方式分散在单晶体压电体的第二表面上。 第二导电层被数字地分散在单晶体压电体的第一表面上。

公开(公告)号：US09385685B2

公开(公告)日：2016-07-05

申请号：US14031454

申请日：2013-09-19

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee ,  Sergei Zhgoon

IPC: H01L41/053 ,  H01L41/047 ,  H03H9/25 ,  H03H9/125 ,  H03H9/15 ,  C04B35/00 ,  H03H9/17

CPC classification number: H03H9/17 ,  H03H2009/155

Abstract: A micro-electrical-mechanical system (MEMS) vibrating structure includes a carrier substrate, a first anchor, a second anchor, a single crystal piezoelectric body, a first conducting layer, and a second conducting layer. The first anchor and the second anchor are provided on the surface of the carrier substrate. The single-crystal piezoelectric body is suspended between the first anchor and the second anchor, and includes a uniform crystalline orientation defined by a set of Euler angles. The single-crystal piezoelectric body includes a first surface parallel to and facing the surface of the carrier substrate on which the first anchor and the second anchor are formed and a second surface opposite the first surface. The first conducting layer is inter-digitally dispersed on the second surface of the single-crystal piezoelectric body. The second conducting layer is inter-digitally dispersed on the first surface of the single-crystal piezoelectric body.

Abstract translation: 微电气机械系统（MEMS）振动结构包括载体基板，第一锚固件，第二锚定器，单晶体压电体，第一导电层和第二导电层。 第一锚固件和第二锚固件设置在载体基板的表面上。 单晶压电体悬挂在第一锚和第二锚之间，并且包括由一组欧拉角定义的均匀结晶取向。 单晶体压电体包括平行于并面向其上形成有第一锚和第二锚的载体基板的表面的第一表面和与第一表面相对的第二表面。 第一导电层以数字方式分散在单晶体压电体的第二表面上。 第二导电层被数字地分散在单晶体压电体的第一表面上。

公开(公告)号：US20150318838A1

公开(公告)日：2015-11-05

申请号：US14703060

申请日：2015-05-04

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee ,  Sergei Zhgoon

IPC: H03H9/02 ,  H03H9/17

CPC classification number: H03H9/02228 ,  H03H9/02338 ,  H03H9/172 ,  H03H2009/155 ,  H03H2009/241

Abstract: A MEMS vibrating device includes a substrate, at least one anchor on a surface of the substrate, and a vibrating body suspended over the substrate by the at least one anchor. The vibrating body includes a first piezoelectric thin-film layer, a second piezoelectric thin-film layer over the first piezoelectric thin-film layer, and an inter-digital transducer embedded between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer. Embedding the inter-digital transducer between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer may result in enhanced vibrational characteristics of the MEMS vibrating device, thereby increasing the performance thereof.

Abstract translation: MEMS振动装置包括基板，在基板的表面上的至少一个锚定件以及通过至少一个锚悬挂在基板上的振动体。 振动体包括第一压电薄膜层，第一压电薄膜层上的第二压电薄膜层和嵌入在第一压电薄膜层和第二压电薄膜之间的数字间换能器 层。 在第一压电薄膜层和第二压电薄膜层之间嵌入数字式换能器可能导致MEMS振动装置的振动特性的增强，从而提高其性能。

公开(公告)号：US09998088B2

公开(公告)日：2018-06-12

申请号：US14703060

申请日：2015-05-04

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee ,  Sergei Zhgoon

IPC: H03H9/25 ,  H01L41/09 ,  H03H9/02 ,  H03H9/17 ,  H03H9/15 ,  H03H9/24

CPC classification number: H03H9/02228 ,  H03H9/02338 ,  H03H9/172 ,  H03H2009/155 ,  H03H2009/241

Abstract: A MEMS vibrating device includes a substrate, at least one anchor on a surface of the substrate, and a vibrating body suspended over the substrate by the at least one anchor. The vibrating body includes a first piezoelectric thin-film layer, a second piezoelectric thin-film layer over the first piezoelectric thin-film layer, and an inter-digital transducer embedded between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer. Embedding the inter-digital transducer between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer may result in enhanced vibrational characteristics of the MEMS vibrating device, thereby increasing the performance thereof.

公开(公告)号：US20140210314A1

公开(公告)日：2014-07-31

申请号：US14031383

申请日：2013-09-19

Applicant: RF Micro Devices, Inc.

Inventor： Kushal Bhattacharjee ,  Sergei Zhgoon

IPC: H03H9/17

CPC classification number: H03H9/17 ,  H03H2009/155

Abstract: A micro-electrical-mechanical system (MEMS) vibrating structure includes a carrier substrate, a first anchor, a second anchor, a single crystal piezoelectric body, and a conducting layer. The first anchor and the second anchor are provided on the surface of the carrier substrate. The single-crystal piezoelectric body is suspended between the first anchor and the second anchor, and includes a uniform crystalline orientation defined by a set of Euler angles. The single-crystal piezoelectric body includes a first surface parallel to and facing the surface of the carrier substrate on which the first anchor and the second anchor are formed and a second surface opposite the first surface. The conducting layer is inter-digitally dispersed, and is formed on the second surface of the single-crystal piezoelectric body. The first surface of the single-crystal piezoelectric body is left exposed.

Abstract translation: 微机电系统（MEMS）振动结构包括载体基板，第一锚固件，第二锚固件，单晶体压电体和导电层。 第一锚固件和第二锚固件设置在载体基板的表面上。 单晶压电体悬挂在第一锚和第二锚之间，并且包括由一组欧拉角定义的均匀结晶取向。 单晶体压电体包括平行于并面向其上形成有第一锚和第二锚的载体基板的表面的第一表面和与第一表面相对的第二表面。 导电层是数字间分散的，并且形成在单晶体压电体的第二表面上。 单晶体压电体的第一面露出。