Invention Grant
US09397054B2 Semiconductor structure with an interconnect level having a conductive pad and metallic structure such as a base of a crackstop 有权
具有互连层的半导体结构具有导电焊盘和金属结构,例如裂缝挡板的基部

Semiconductor structure with an interconnect level having a conductive pad and metallic structure such as a base of a crackstop
Abstract:
A semiconductor structure with an interconnect level above a substrate and including a conductive pad and a metallic structure, such as a base of a crackstop. A first dielectric layer is above the conductive pad and above the metallic structure. A first opening in the first dielectric layer is aligned with and exposes the conductive pad and a second opening is aligned with and exposes the metallic structure. A metallic liner lines the first opening and the second opening and is on the top surface of the first dielectric layer. A second dielectric layer is above the metallic liner and a third dielectric layer is above the second dielectric layer. A third opening exposes a portion of the metal liner above the conductive pad and a copper plug and pedestal are in the third opening on the exposed portion of the metal liner.
Public/Granted literature
Information query
Patent Agency Ranking
0/0