Invention Grant
US09397054B2 Semiconductor structure with an interconnect level having a conductive pad and metallic structure such as a base of a crackstop
有权
具有互连层的半导体结构具有导电焊盘和金属结构,例如裂缝挡板的基部
- Patent Title: Semiconductor structure with an interconnect level having a conductive pad and metallic structure such as a base of a crackstop
- Patent Title (中): 具有互连层的半导体结构具有导电焊盘和金属结构,例如裂缝挡板的基部
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Application No.: US14876889Application Date: 2015-10-07
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Publication No.: US09397054B2Publication Date: 2016-07-19
- Inventor: Timothy H. Daubenspeck , Jeffrey P. Gambino , Christopher D. Muzzy , Wolfgang Sauter
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Gibb & Riley, LLC
- Agent Anthony J. Canale
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/00 ; H01L21/768 ; H01L23/31 ; H01L23/58 ; H01L23/522

Abstract:
A semiconductor structure with an interconnect level above a substrate and including a conductive pad and a metallic structure, such as a base of a crackstop. A first dielectric layer is above the conductive pad and above the metallic structure. A first opening in the first dielectric layer is aligned with and exposes the conductive pad and a second opening is aligned with and exposes the metallic structure. A metallic liner lines the first opening and the second opening and is on the top surface of the first dielectric layer. A second dielectric layer is above the metallic liner and a third dielectric layer is above the second dielectric layer. A third opening exposes a portion of the metal liner above the conductive pad and a copper plug and pedestal are in the third opening on the exposed portion of the metal liner.
Public/Granted literature
- US20160027744A1 METHOD OF FORMING AN INTEGRATED CRACKSTOP Public/Granted day:2016-01-28
Information query
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