Invention Grant
- Patent Title: Methods of making a self-aligned channel drift device
- Patent Title (中): 制造自对准通道漂移装置的方法
-
Application No.: US14922308Application Date: 2015-10-26
-
Publication No.: US09397191B2Publication Date: 2016-07-19
- Inventor: Jerome Ciavatti , Yanxiang Liu
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/265 ; H01L29/78 ; H01L29/08 ; H01L21/324 ; H01L21/8234 ; H01L29/06

Abstract:
An isolation region is formed in a semiconductor substrate to laterally define and electrically isolate a device region and first and second laterally adjacent well regions are formed in the device region. A gate structure is formed above the device region such that the first well region extends below an entirety of the gate structure and a well region interface formed between the first and second well regions is laterally offset from a drain-side edge of the gate structure. Source and drain regions are formed in the device region such that the source region extends laterally from a source-side edge of the gate structure and across a first portion of the first well region to a first inner edge of the isolation region and the drain region extends laterally from the drain-side edge and across a second portion of the first well region.
Public/Granted literature
- US20160056265A1 METHODS OF MAKING A SELF-ALIGNED CHANNEL DRIFT DEVICE Public/Granted day:2016-02-25
Information query
IPC分类: