Invention Grant
- Patent Title: Bolometer having frequency detection
- Patent Title (中): 测速仪具有频率检测功能
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Application No.: US13824719Application Date: 2011-09-23
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Publication No.: US09400218B2Publication Date: 2016-07-26
- Inventor: Laurent Duraffourg , Philippe Andreucci
- Applicant: Laurent Duraffourg , Philippe Andreucci
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1057672 20100923
- International Application: PCT/EP2011/066564 WO 20110923
- International Announcement: WO2012/038524 WO 20120329
- Main IPC: G01J5/00
- IPC: G01J5/00 ; G01H13/00 ; G01K11/26 ; G01J5/28 ; G01J5/02 ; G01J5/40 ; G01J5/44 ; H01L31/18
Abstract:
A bolometer including: at least one electromechanical microsystem or nanosystem, the microsystem or nanosystem including a support and a mobile mass hung from beams above the support, the mobile mass forming an absorber of optical flux; actuation electrodes configured to set the mobile mass in vibration and arranged laterally relative to the mobile mass; and detection electrodes to detect variation in vibration frequency of the mobile mass arranged laterally relative to the mobile mass.
Public/Granted literature
- US20130170517A1 BOLOMETER HAVING FREQUENCY DETECTION Public/Granted day:2013-07-04
Information query
