Invention Grant
- Patent Title: Adjustable mass resolving aperture
- Patent Title (中): 可调质量分辨孔径
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Application No.: US14217064Application Date: 2014-03-17
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Publication No.: US09401260B2Publication Date: 2016-07-26
- Inventor: Glenn E. Lane
- Applicant: GLENN LANE FAMILY LIMITED LIABILITY LIMITED PARTNERSHIP
- Applicant Address: US FL Summerfield
- Assignee: Glenn Lane Family Limited Liability Limited Partnership
- Current Assignee: Glenn Lane Family Limited Liability Limited Partnership
- Current Assignee Address: US FL Summerfield
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/317 ; H01J37/09

Abstract:
Embodiments of the invention relate to a mass resolving aperture that may be used in an ion implantation system that selectively exclude ion species based on charge to mass ratio (and/or mass to charge ratio) that are not desired for implantation, in an ion beam assembly. Embodiments of the invention relate to a mass resolving aperture that is segmented, adjustable, and/or presents a curved surface to the oncoming ion species that will strike the aperture. Embodiments of the invention also relate to the filtering of a flow of charged particles through a closed plasma channel (CPC) superconductor, or boson energy transmission system.
Public/Granted literature
- US20140261173A1 ADJUSTABLE MASS RESOLVING APERTURE Public/Granted day:2014-09-18
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