发明授权
- 专利标题： Microelectromechanical transducer and test system
- 专利标题（中）： 微机电传感器和测试系统
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申请号： US13685254申请日： 2012-11-26
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公开(公告)号： US09404841B2公开(公告)日： 2016-08-02
- 发明人: Yunje Oh , Syed Amanula Syed Asif , Oden Warren
- 申请人： Hysitron Incorporated
- 申请人地址： US MN Eden Prairie
- 专利权人： Hysitron, Inc.
- 当前专利权人： Hysitron, Inc.
- 当前专利权人地址： US MN Eden Prairie
- 代理机构： Dicke, Billig & Czaja, PLLC
- 主分类号： G01N3/48
- IPC分类号： G01N3/48 ; G01N3/40 ; G01Q60/36 ; G01N3/42 ; G01N19/00 ; G01B7/34
摘要：
A microelectromechanical transducer and test system is disclosed. One embodiment includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe.
公开/授权文献
- US20130098144A1 MICROELECTROMECHANICAL TRANSDUCER AND TEST SYSTEM 公开/授权日：2013-04-25
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