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公开(公告)号：US20130098145A1
公开(公告)日：2013-04-25
申请号：US13688034
申请日：2012-11-28
发明人： Yunje Oh , Ryan Major , Douglas Stauffer , Syed Amanula Syed Asif
IPC分类号： G01N3/42
CPC分类号： G01N3/42 , B82Y35/00 , G01N2203/0051 , G01N2203/0286 , G01N2203/0617 , G01Q60/366
摘要： A system and method of measuring an interaction force is disclosed. One embodiment includes providing a method of measuring an interaction force including providing a microelectromechanical transducer. The transducer includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a differential capacitive displacement sensor to provide a sensor output signal representative of an interaction force on the probe. The probe is moved relative to a sample surface. An interaction force is determined between the probe and the sample surface using the sensor output, as the probe is moved relative to the sample surface.
摘要翻译： 公开了一种测量相互作用力的系统和方法。 一个实施例包括提供测量相互作用力的方法，包括提供微机电换能器。 换能器包括主体，可相对于主体移动的探头以及微机械梳状驱动器。 微加工梳状驱动器包括差分电容位移传感器，以提供表示探针上的相互作用力的传感器输出信号。 探针相对于样品表面移动。 当探针相对于样品表面移动时，使用传感器输出在探针和样品表面之间确定相互作用力。
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公开(公告)号：US09404841B2
公开(公告)日：2016-08-02
申请号：US13685254
申请日：2012-11-26
发明人： Yunje Oh , Syed Amanula Syed Asif , Oden Warren
CPC分类号： G01N3/40 , G01B7/34 , G01N3/42 , G01N19/00 , G01N2203/0051 , G01N2203/0286 , G01N2203/0617 , G01Q60/366 , Y10S977/956
摘要： A microelectromechanical transducer and test system is disclosed. One embodiment includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe.
摘要翻译： 公开了一种微机电换能器和测试系统。 一个实施例包括主体，可相对于主体移动的探针以及微加工梳状驱动器。 微加工梳状驱动器包括形成差分电容位移传感器的多个感测电容器，每个感测电容器包括多个梳状电容器，并且每个感测电容器被配置为提供一起代表探头位置的电容电平。
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公开(公告)号：US09335240B2
公开(公告)日：2016-05-10
申请号：US13688034
申请日：2012-11-28
发明人： Yunje Oh , Ryan Major , Douglas Stauffer , Syed Amanula Syed Asif
CPC分类号： G01N3/42 , B82Y35/00 , G01N2203/0051 , G01N2203/0286 , G01N2203/0617 , G01Q60/366
摘要： A system and method of measuring an interaction force is disclosed. One embodiment includes providing a method of measuring an interaction force including providing a microelectromechanical transducer. The transducer includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a differential capacitive displacement sensor to provide a sensor output signal representative of an interaction force on the probe. The probe is moved relative to a sample surface. An interaction force is determined between the probe and the sample surface using the sensor output, as the probe is moved relative to the sample surface.
摘要翻译： 公开了一种测量相互作用力的系统和方法。 一个实施例包括提供测量相互作用力的方法，包括提供微机电换能器。 换能器包括主体，可相对于主体移动的探头以及微机械梳状驱动器。 微加工梳状驱动器包括差分电容位移传感器，以提供表示探针上的相互作用力的传感器输出信号。 探针相对于样品表面移动。 当探针相对于样品表面移动时，使用传感器输出在探针和样品表面之间确定相互作用力。
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公开(公告)号：US20130098144A1
公开(公告)日：2013-04-25
申请号：US13685254
申请日：2012-11-26
发明人： Yunje Oh , Syed Amanula Syed Asif , Oden Warren
IPC分类号： G01N3/40
CPC分类号： G01N3/40 , G01B7/34 , G01N3/42 , G01N19/00 , G01N2203/0051 , G01N2203/0286 , G01N2203/0617 , G01Q60/366 , Y10S977/956
摘要： A microelectromechanical transducer and test system is disclosed. One embodiment includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe.
摘要翻译： 公开了一种微机电换能器和测试系统。 一个实施例包括主体，可相对于主体移动的探针以及微加工梳状驱动器。 微加工梳状驱动器包括形成差分电容位移传感器的多个感测电容器，每个感测电容器包括多个梳状电容器，并且每个感测电容器被配置为提供一起代表探头位置的电容电平。
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